High-order calculation by 3-point method for precise roundness measurement

Sotomitsu Hara, Toru Namerikawa, Fumio Matsumura

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In the field of roundness measurements, the 3-point method is very useful. We used this method for precise column estimation in the range of 0.01 micron p-p including high-order harmonic components up to the 254th. The high-order calculation is critical for setting angles among three sensors. We determined the invalid setting angles and showed it on a chart, and we show a method for obtaining suitable accurate angles among these sensors. We are testing the relative accuracy on the testing model. Absolute accuracy has not been confirmed yet, but we consider that these results show me a reasonable roundness.

Original languageEnglish
Pages (from-to)4596-4602
Number of pages7
JournalNippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Volume62
Issue number604
Publication statusPublished - 1996 Dec
Externally publishedYes

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Sensors
Testing

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

High-order calculation by 3-point method for precise roundness measurement. / Hara, Sotomitsu; Namerikawa, Toru; Matsumura, Fumio.

In: Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, Vol. 62, No. 604, 12.1996, p. 4596-4602.

Research output: Contribution to journalArticle

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