High-sensitivity triaxial tactile sensor with elastic microstructures pressing on piezoresistive cantilevers

Nguyen Thanh-Vinh; Nguyen Binh-Khiem; Hidetoshi Takahashi; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1016/j.sna.2013.09.002

High-sensitivity triaxial tactile sensor with elastic microstructures pressing on piezoresistive cantilevers

Nguyen Thanh-Vinh, Nguyen Binh-Khiem, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journal › Article › peer-review

71 Citations (Scopus)

Abstract

In this paper, we proposed a design to increase the sensitivity of a piezoresistive-type triaxial tactile sensor. Using conventional piezoresistive tactile sensors, in which the piezoresistive elements were completely embedded inside an elastic block, our proposed tactile sensor design features an air cavity underneath the piezoresistive elements. The cavity was created by pressing an elastic cap with microstructures onto the piezoresistive cantilevers of a sensor chip. We confirmed that the proposed design increased the sensitivity of the tactile sensor by approximately 150 times and 100 times in response to normal and lateral forces, respectively.

Original language	English
Pages (from-to)	167-175
Number of pages	9
Journal	Sensors and Actuators, A: Physical
Volume	215
DOIs	https://doi.org/10.1016/j.sna.2013.09.002
Publication status	Published - 2014 Aug 15
Externally published	Yes

Keywords

Air cavity
High sensitivity
PDMS cap
Piezoresistive cantilever
Triaxial tactile sensor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Access to Document

10.1016/j.sna.2013.09.002

Cite this

@article{14372d023f5c46bf905a15ff08e2ddc0,

title = "High-sensitivity triaxial tactile sensor with elastic microstructures pressing on piezoresistive cantilevers",

abstract = "In this paper, we proposed a design to increase the sensitivity of a piezoresistive-type triaxial tactile sensor. Using conventional piezoresistive tactile sensors, in which the piezoresistive elements were completely embedded inside an elastic block, our proposed tactile sensor design features an air cavity underneath the piezoresistive elements. The cavity was created by pressing an elastic cap with microstructures onto the piezoresistive cantilevers of a sensor chip. We confirmed that the proposed design increased the sensitivity of the tactile sensor by approximately 150 times and 100 times in response to normal and lateral forces, respectively.",

keywords = "Air cavity, High sensitivity, PDMS cap, Piezoresistive cantilever, Triaxial tactile sensor",

author = "Nguyen Thanh-Vinh and Nguyen Binh-Khiem and Hidetoshi Takahashi and Kiyoshi Matsumoto and Isao Shimoyama",

note = "Funding Information: This work was supported by JSPS KAKENHI Grant Numbers 23310089 and 24656162 . ",

year = "2014",

month = aug,

day = "15",

doi = "10.1016/j.sna.2013.09.002",

language = "English",

volume = "215",

pages = "167--175",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

}

TY - JOUR

T1 - High-sensitivity triaxial tactile sensor with elastic microstructures pressing on piezoresistive cantilevers

AU - Thanh-Vinh, Nguyen

AU - Binh-Khiem, Nguyen

AU - Takahashi, Hidetoshi

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

N1 - Funding Information: This work was supported by JSPS KAKENHI Grant Numbers 23310089 and 24656162 .

PY - 2014/8/15

Y1 - 2014/8/15

N2 - In this paper, we proposed a design to increase the sensitivity of a piezoresistive-type triaxial tactile sensor. Using conventional piezoresistive tactile sensors, in which the piezoresistive elements were completely embedded inside an elastic block, our proposed tactile sensor design features an air cavity underneath the piezoresistive elements. The cavity was created by pressing an elastic cap with microstructures onto the piezoresistive cantilevers of a sensor chip. We confirmed that the proposed design increased the sensitivity of the tactile sensor by approximately 150 times and 100 times in response to normal and lateral forces, respectively.

AB - In this paper, we proposed a design to increase the sensitivity of a piezoresistive-type triaxial tactile sensor. Using conventional piezoresistive tactile sensors, in which the piezoresistive elements were completely embedded inside an elastic block, our proposed tactile sensor design features an air cavity underneath the piezoresistive elements. The cavity was created by pressing an elastic cap with microstructures onto the piezoresistive cantilevers of a sensor chip. We confirmed that the proposed design increased the sensitivity of the tactile sensor by approximately 150 times and 100 times in response to normal and lateral forces, respectively.

KW - Air cavity

KW - High sensitivity

KW - PDMS cap

KW - Piezoresistive cantilever

KW - Triaxial tactile sensor

UR - http://www.scopus.com/inward/record.url?scp=84903305328&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84903305328&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2013.09.002

DO - 10.1016/j.sna.2013.09.002

M3 - Article

AN - SCOPUS:84903305328

SN - 0924-4247

VL - 215

SP - 167

EP - 175

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

High-sensitivity triaxial tactile sensor with elastic microstructures pressing on piezoresistive cantilevers

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this