Highly sensitive and low-crosstalk angular acceleration sensor using mirror-symmetric liquid ring channels and MEMS piezoresistive cantilevers

Hidetoshi Takahashi, Tetsuo Kan, Akihito Nakai, Tomoyuki Takahata, Takanori Usami, Isao Shimoyama

Research output: Contribution to journalArticle

Abstract

This paper describes an angular acceleration sensor that uses liquid ring channels and piezoresistive cantilevers. The detection of fluidic rotation has attracted attention as a sensing principle for angular acceleration due to the simple structure and potentially low power consumption of devices that use said principle. Although the existing angular acceleration sensors that use this sensing principle have the potential for high sensitivity to angular acceleration about the target axis, crosstalk is an issue—specifically, crosstalk with angular accelerations about other axes and with linear acceleration. Here, we propose an angular acceleration sensor that uses a MEMS piezoresistive cantilever as the sensing element and two mirror-symmetric ring channels. This mirror symmetry cancels out the signals due to accelerations about the other axes, while the signal for the angular acceleration about the target axis is doubled. The experimental results show that the sensitivity to other axial angular accelerations and linear acceleration is sufficiently small. The obtained sensitivity for the angular acceleration is as high as 3.1 × 10 −4 (rad/s 2 ) -1 , similar to theoretical predictions. This value for the sensitivity is maintained over a range of frequencies from 0.1 Hz to 100 Hz. Therefore, the proposed sensor is suitable for practical angular acceleration detection applications.

Original languageEnglish
Pages (from-to)39-47
Number of pages9
JournalSensors and Actuators, A: Physical
Volume287
DOIs
Publication statusPublished - 2019 Mar 1
Externally publishedYes

Fingerprint

angular acceleration
Crosstalk
crosstalk
microelectromechanical systems
MEMS
Mirrors
mirrors
rings
sensors
Sensors
Liquids
liquids
sensitivity
fluidics
Fluidics

Keywords

  • Angular acceleration sensor
  • Piezoresistive cantilever
  • Ring flow channel

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

Highly sensitive and low-crosstalk angular acceleration sensor using mirror-symmetric liquid ring channels and MEMS piezoresistive cantilevers. / Takahashi, Hidetoshi; Kan, Tetsuo; Nakai, Akihito; Takahata, Tomoyuki; Usami, Takanori; Shimoyama, Isao.

In: Sensors and Actuators, A: Physical, Vol. 287, 01.03.2019, p. 39-47.

Research output: Contribution to journalArticle

@article{98629874f0724b49ab5f0a22f4133a70,
title = "Highly sensitive and low-crosstalk angular acceleration sensor using mirror-symmetric liquid ring channels and MEMS piezoresistive cantilevers",
abstract = "This paper describes an angular acceleration sensor that uses liquid ring channels and piezoresistive cantilevers. The detection of fluidic rotation has attracted attention as a sensing principle for angular acceleration due to the simple structure and potentially low power consumption of devices that use said principle. Although the existing angular acceleration sensors that use this sensing principle have the potential for high sensitivity to angular acceleration about the target axis, crosstalk is an issue—specifically, crosstalk with angular accelerations about other axes and with linear acceleration. Here, we propose an angular acceleration sensor that uses a MEMS piezoresistive cantilever as the sensing element and two mirror-symmetric ring channels. This mirror symmetry cancels out the signals due to accelerations about the other axes, while the signal for the angular acceleration about the target axis is doubled. The experimental results show that the sensitivity to other axial angular accelerations and linear acceleration is sufficiently small. The obtained sensitivity for the angular acceleration is as high as 3.1 × 10 −4 (rad/s 2 ) -1 , similar to theoretical predictions. This value for the sensitivity is maintained over a range of frequencies from 0.1 Hz to 100 Hz. Therefore, the proposed sensor is suitable for practical angular acceleration detection applications.",
keywords = "Angular acceleration sensor, Piezoresistive cantilever, Ring flow channel",
author = "Hidetoshi Takahashi and Tetsuo Kan and Akihito Nakai and Tomoyuki Takahata and Takanori Usami and Isao Shimoyama",
year = "2019",
month = "3",
day = "1",
doi = "10.1016/j.sna.2019.01.006",
language = "English",
volume = "287",
pages = "39--47",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",

}

TY - JOUR

T1 - Highly sensitive and low-crosstalk angular acceleration sensor using mirror-symmetric liquid ring channels and MEMS piezoresistive cantilevers

AU - Takahashi, Hidetoshi

AU - Kan, Tetsuo

AU - Nakai, Akihito

AU - Takahata, Tomoyuki

AU - Usami, Takanori

AU - Shimoyama, Isao

PY - 2019/3/1

Y1 - 2019/3/1

N2 - This paper describes an angular acceleration sensor that uses liquid ring channels and piezoresistive cantilevers. The detection of fluidic rotation has attracted attention as a sensing principle for angular acceleration due to the simple structure and potentially low power consumption of devices that use said principle. Although the existing angular acceleration sensors that use this sensing principle have the potential for high sensitivity to angular acceleration about the target axis, crosstalk is an issue—specifically, crosstalk with angular accelerations about other axes and with linear acceleration. Here, we propose an angular acceleration sensor that uses a MEMS piezoresistive cantilever as the sensing element and two mirror-symmetric ring channels. This mirror symmetry cancels out the signals due to accelerations about the other axes, while the signal for the angular acceleration about the target axis is doubled. The experimental results show that the sensitivity to other axial angular accelerations and linear acceleration is sufficiently small. The obtained sensitivity for the angular acceleration is as high as 3.1 × 10 −4 (rad/s 2 ) -1 , similar to theoretical predictions. This value for the sensitivity is maintained over a range of frequencies from 0.1 Hz to 100 Hz. Therefore, the proposed sensor is suitable for practical angular acceleration detection applications.

AB - This paper describes an angular acceleration sensor that uses liquid ring channels and piezoresistive cantilevers. The detection of fluidic rotation has attracted attention as a sensing principle for angular acceleration due to the simple structure and potentially low power consumption of devices that use said principle. Although the existing angular acceleration sensors that use this sensing principle have the potential for high sensitivity to angular acceleration about the target axis, crosstalk is an issue—specifically, crosstalk with angular accelerations about other axes and with linear acceleration. Here, we propose an angular acceleration sensor that uses a MEMS piezoresistive cantilever as the sensing element and two mirror-symmetric ring channels. This mirror symmetry cancels out the signals due to accelerations about the other axes, while the signal for the angular acceleration about the target axis is doubled. The experimental results show that the sensitivity to other axial angular accelerations and linear acceleration is sufficiently small. The obtained sensitivity for the angular acceleration is as high as 3.1 × 10 −4 (rad/s 2 ) -1 , similar to theoretical predictions. This value for the sensitivity is maintained over a range of frequencies from 0.1 Hz to 100 Hz. Therefore, the proposed sensor is suitable for practical angular acceleration detection applications.

KW - Angular acceleration sensor

KW - Piezoresistive cantilever

KW - Ring flow channel

UR - http://www.scopus.com/inward/record.url?scp=85059845610&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85059845610&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2019.01.006

DO - 10.1016/j.sna.2019.01.006

M3 - Article

VL - 287

SP - 39

EP - 47

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

ER -