Highly Sensitive Angular Accelerometer Utilizing Piezoresistive Cantilever and Spiral Liquid Channel

Byeongwook Jo, Hidetoshi Takahashi, Tomoyuki Takahata, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a highly sensitive angular accelerometer utilizing a piezoresistive cantilever and spiral liquid channels. The spiral structure increases the total inertial force of liquid due to angular acceleration, which leads to the sensitivity enhancement. The differential pressure between two spiral liquid channels was measured by a piezoresistive cantilever with the resolution of 0.01 Pa. The developed sensor with number of turns of the spiral with 25 achieved the sensitivity enhancement by 28.5 times, compared to the ring channel sensor.

Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages206-209
Number of pages4
ISBN (Electronic)9781728116105
DOIs
Publication statusPublished - 2019 Jan
Externally publishedYes
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: 2019 Jan 272019 Jan 31

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period19/1/2719/1/31

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Jo, B., Takahashi, H., Takahata, T., & Shimoyama, I. (2019). Highly Sensitive Angular Accelerometer Utilizing Piezoresistive Cantilever and Spiral Liquid Channel. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 206-209). [8870806] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870806