Hollow Lamé mode MEMS mass sensors with 10 ppb-range stability for particles counting and weighing in fluid

Celine Hadji, Ichiro Fukada, Francois Baleras, Yoshihiro Taguchi, Beatrice Icard, Vincent Agache

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports hollow MEMS plate oscillators for mass sensing in liquid with an extracted mass resolution of 7 femtograms. The sensors performances show a one-fold improvement compared to previous alike structures - 10,000-range Q factor and ppb-range frequency stability. These devices are connected through a customized plug and play test platform and do not need to work in a vacuum-sealed package. These performances, reached in ambient conditions whether the embedded channel is filled with air or water, make the devices potentially amenable to individual particles metrology from a few 10 nm up to the μm diameter range.

Original languageEnglish
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1121-1124
Number of pages4
ISBN (Print)9781479989553
DOIs
Publication statusPublished - 2015 Aug 5
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: 2015 Jun 212015 Jun 25

Other

Other18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
CountryUnited States
CityAnchorage
Period15/6/2115/6/25

Keywords

  • Allan deviation
  • Lamé mode resonators
  • mass sensing
  • MEMS
  • microfluidics

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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