Hollow Lamé mode MEMS mass sensors with 10 ppb-range stability for particles counting and weighing in fluid

Celine Hadji, Ichiro Fukada, Francois Baleras, Yoshihiro Taguchi, Beatrice Icard, Vincent Agache

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Physics & Astronomy

Engineering & Materials Science