Hydrolysis Deposition of Thin Films of Antimony-Doped Tin Oxide

Koji Tsukuma, Tomoyuki Akiyama, Hiroaki Imai

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Thin films of antimony-doped tin oxide have been obtained by a new technique, the so-called hydrolysis deposition method, in which hydrolyzed solids are precipitated from metal fluoride solutions. Mixed solutions of SnF3 and SbF3 produce antimony- and fluorine-doped tin oxide films. The amount of antimony can be controlled in a wide range by adjusting the initial fluoride concentrations of the solution. The film containing 2.9 mol% antimony heated at 500°C has an electrical resistivity of 1.0 × 10-3 Ω·cm, which is lower than previously obtained by wet-chemical techniques.

Original languageEnglish
Pages (from-to)869-871
Number of pages3
JournalJournal of the American Ceramic Society
Volume84
Issue number4
DOIs
Publication statusPublished - 2001 Apr

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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