Abstract
The optical-beam-induced resistance-change-detection (OBIRCH) method has been improved by using a near-field optical probe as the heat source instead of a laser beam. The near-field OBIRCH method has two advantages over the conventional one: (1) its spatial resolution is higher (50 vs 400 nm) and (2) the optical-probe-induced resistance change caused by heating can be observed using a metallized probe without interference from a photocurrent created by electron-hole-pair generation. In the conventional-OBIRCH method, the laser beam creates not only a resistance change, but also a photocurrent that can mask the resistance change signals.
| Original language | English |
|---|---|
| Pages (from-to) | 1048-1050 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 74 |
| Issue number | 7 |
| Publication status | Published - 1999 Feb 15 |
| Externally published | Yes |
Fingerprint
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Imaging of current paths and defects in Al and TiSi interconnects on very-large-scale integrated-circuit chips using near-field optical-probe stimulation and resulting resistance change. / Nikawa, K.; Saiki, Toshiharu; Inoue, S.; Ohtsu, M.
In: Applied Physics Letters, Vol. 74, No. 7, 15.02.1999, p. 1048-1050.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Imaging of current paths and defects in Al and TiSi interconnects on very-large-scale integrated-circuit chips using near-field optical-probe stimulation and resulting resistance change
AU - Nikawa, K.
AU - Saiki, Toshiharu
AU - Inoue, S.
AU - Ohtsu, M.
PY - 1999/2/15
Y1 - 1999/2/15
N2 - The optical-beam-induced resistance-change-detection (OBIRCH) method has been improved by using a near-field optical probe as the heat source instead of a laser beam. The near-field OBIRCH method has two advantages over the conventional one: (1) its spatial resolution is higher (50 vs 400 nm) and (2) the optical-probe-induced resistance change caused by heating can be observed using a metallized probe without interference from a photocurrent created by electron-hole-pair generation. In the conventional-OBIRCH method, the laser beam creates not only a resistance change, but also a photocurrent that can mask the resistance change signals.
AB - The optical-beam-induced resistance-change-detection (OBIRCH) method has been improved by using a near-field optical probe as the heat source instead of a laser beam. The near-field OBIRCH method has two advantages over the conventional one: (1) its spatial resolution is higher (50 vs 400 nm) and (2) the optical-probe-induced resistance change caused by heating can be observed using a metallized probe without interference from a photocurrent created by electron-hole-pair generation. In the conventional-OBIRCH method, the laser beam creates not only a resistance change, but also a photocurrent that can mask the resistance change signals.
UR - http://www.scopus.com/inward/record.url?scp=0005336970&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0005336970&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0005336970
VL - 74
SP - 1048
EP - 1050
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 7
ER -