Impact of hot wire and material gas species on the Cat-CVD coating of gas barrier SiOC thin films onto PET bottles

Masaki Nakaya, Shigeo Yasuhara, Tomoki Maeda, Atsushi Hotta

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

In an attempt to enhance the gas barrier property of plastic containers such as poly(ethylene terephthalate) bottles, a hot wire chemical vapor deposition (CVD) technique for a type of SiOC thin film, which has been recently found to be applicable in this field, was further studied using different hot wire and material gas species. As a result, the authors found practically useful coating was possible with specific combinations of the hot wire and material gas species.

Original languageEnglish
Pages (from-to)21-29
Number of pages9
JournalSurface and Coatings Technology
Volume344
DOIs
Publication statusPublished - 2018 Jun 25
Externally publishedYes

Keywords

  • Catalytic
  • Chemical vapor deposition
  • Gas barrier
  • PET
  • Permeation
  • Thin film

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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