Improvement of the Crystal Orientation and Surface Roughness of Ru Thin Films by Introducing Oxygen during Sputtering

Yoshio Abe, Satoko Shinkai, Katsutaka Sasaki, Jiwang Yan, Kouki Maekawa

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy