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Dive into the research topics of 'Improvement of the Crystal Orientation and Surface Roughness of Ru Thin Films by Introducing Oxygen during Sputtering'. Together they form a unique fingerprint.- Sort by
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Yoshio Abe, Satoko Shinkai, Katsutaka Sasaki, Jiwang Yan, Kouki Maekawa
Research output: Contribution to journal › Article › peer-review