Fingerprint
Dive into the research topics of 'Improvement of the Crystal Orientation and Surface Roughness of Ru Thin Films by Introducing Oxygen during Sputtering'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Improvement of the Crystal Orientation and Surface Roughness of Ru Thin Films by Introducing Oxygen during Sputtering
Yoshio Abe, Satoko Shinkai, Katsutaka Sasaki, Jiwang Yan, Kouki Maekawa
Research output: Contribution to journal › Article › peer-review
6
Citations
(Scopus)