Improvement of ZnO TCO film growth for photovoltaic devices by reactive plasma deposition (RPD)

K. Iwata, T. Sakemi, A. Yamada, P. Fons, K. Awai, T. Yamamoto, S. Shirakata, K. Matsubara, H. Tampo, K. Sakurai, S. Ishizuka, S. Niki

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