In situ diagnostic methods for thin-film fabrication: Utilization of heat radiation and light scattering

K. Sakurai, R. Hunger, R. Scheer, C. A. Kaufmann, A. Yamada, T. Baba, Y. Kimura, K. Matsubara, P. Fons, H. Nakanishi, S. Niki

Research output: Contribution to journalArticle

56 Citations (Scopus)

Abstract

Deposition processes of Cu(In,Ga)Se2 (CIGS) thin films were observed by informative and low-cost in situ monitoring means; the pyrometer technique, and the spectroscopic light-scattering (SLS) technique. Intensities of thermal radiation and scattered white light were profiled from outside the vacuum chamber during growth, using a monochromatic pyrometer and a small CCD spectrometer. The deposition process was studied by systematic variations of major process parameters of CIGS, such as the substrate temperature, Ga concentration and Se supply. Various film properties, including the deposition speed, thickness, compositional ratios, surface roughness and precipitation of Cu-rich phases have been monitored in situ.

Original languageEnglish
Pages (from-to)219-234
Number of pages16
JournalProgress in Photovoltaics: Research and Applications
Volume12
Issue number2-3
DOIs
Publication statusPublished - 2004 Jan 1
Externally publishedYes

Keywords

  • CIGS
  • Pyrometer
  • Roughness
  • Se overpressure
  • SLS
  • Solar cells
  • Spectroscopic light scattering
  • Thickness

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'In situ diagnostic methods for thin-film fabrication: Utilization of heat radiation and light scattering'. Together they form a unique fingerprint.

  • Cite this

    Sakurai, K., Hunger, R., Scheer, R., Kaufmann, C. A., Yamada, A., Baba, T., Kimura, Y., Matsubara, K., Fons, P., Nakanishi, H., & Niki, S. (2004). In situ diagnostic methods for thin-film fabrication: Utilization of heat radiation and light scattering. Progress in Photovoltaics: Research and Applications, 12(2-3), 219-234. https://doi.org/10.1002/pip.519