Influence of driving frequency on oxygen atom density in O2 radio frequency capacitively coupled plasma

Takeshi Kitajima, Kouichi Noro, Toshiki Nakano, Toshiaki Makabe

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Abstract

The influence of the driving frequency on the absolute oxygen atom density in an O2 radio frequency (RF) capacitively coupled plasma (CCP) was investigated using vacuum ultraviolet absorption spectroscopy with pulse modulation of the main plasma. A low-power operation of a compact inductively coupled plasma light source was enabled to avoid the significant measurement errors caused by self-absorption in the light source. The pulse modulation of the main plasma enabled accurate absorption measurement for high plasma density conditions by eliminating background signals due to light emission from the main plasma. As for the effects of the driving frequency, the effect of VHP (100 MHz) drive on oxygen atom production was small because of the modest increase in plasma density of electronegative O2 in contrast to the significant increase in electron density previously observed for electropositive Ar. The recombination coefficient of oxygen atoms on the electrode surface was obtained from a decay rate in the afterglow by comparison with a diffusion model, and it showed agreement with previously reported values for several electrode materials.

Original languageEnglish
Pages (from-to)2670-2676
Number of pages7
JournalJournal of Physics D: Applied Physics
Volume37
Issue number19
DOIs
Publication statusPublished - 2004 Oct 7

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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