Influence of frequency, pressure, and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2-SF6 mixtures

Shigeru Kakuta, Zoran Lj Petrović, Fumiyoshi Tochikubo, Toshiaki Makabe

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

Electrical characteristics of rf discharges in SF6 and in its mixtures with N2 were experimentally investigated. In addition space- and time-resolved emission spectroscopy was used to gain a better understanding of kinetics of processes leading to various observed characteristics. A complicated dependence of minimum sustaining voltage on frequency was observed with a peak at 3 MHz. It was explained as the result of transition from the conditions where discharge is sustained by ionization in the bulk and the double-layer region to the conditions where secondary electron yield makes a large contribution. Another possible explanation is the one invoking transition from the conditions where at high-frequency double layer is formed by electron modulation to the condition where a double layer is formed by positive and negative ions. In voltage-current dependencies at 13 MHz two distinct regions were observed similar to the α to γ transitions observed for electropositive gases. Ionization by secondary electrons, however, is not supported by spatiotemporal emission measurements, thus explanation may be sought in different processes such as development of double layers and increased field in the bulk. The current-to-voltage phase is much smaller than in electropositive gases, thus the discharge appears more resistive. For a range of operating conditions the phase even becomes inductive due to negative ion inertia.

Original languageEnglish
Pages (from-to)4923-4931
Number of pages9
JournalJournal of Applied Physics
Volume74
Issue number8
DOIs
Publication statusPublished - 1993

Fingerprint

pressure ratio
gases
negative ions
electric potential
ionization
electrons
sustaining
positive ions
inertia
modulation
kinetics
spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Influence of frequency, pressure, and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2-SF6 mixtures. / Kakuta, Shigeru; Petrović, Zoran Lj; Tochikubo, Fumiyoshi; Makabe, Toshiaki.

In: Journal of Applied Physics, Vol. 74, No. 8, 1993, p. 4923-4931.

Research output: Contribution to journalArticle

Kakuta, Shigeru ; Petrović, Zoran Lj ; Tochikubo, Fumiyoshi ; Makabe, Toshiaki. / Influence of frequency, pressure, and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2-SF6 mixtures. In: Journal of Applied Physics. 1993 ; Vol. 74, No. 8. pp. 4923-4931.
@article{d3f7c906b84d4f2194583a7740b4da3f,
title = "Influence of frequency, pressure, and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2-SF6 mixtures",
abstract = "Electrical characteristics of rf discharges in SF6 and in its mixtures with N2 were experimentally investigated. In addition space- and time-resolved emission spectroscopy was used to gain a better understanding of kinetics of processes leading to various observed characteristics. A complicated dependence of minimum sustaining voltage on frequency was observed with a peak at 3 MHz. It was explained as the result of transition from the conditions where discharge is sustained by ionization in the bulk and the double-layer region to the conditions where secondary electron yield makes a large contribution. Another possible explanation is the one invoking transition from the conditions where at high-frequency double layer is formed by electron modulation to the condition where a double layer is formed by positive and negative ions. In voltage-current dependencies at 13 MHz two distinct regions were observed similar to the α to γ transitions observed for electropositive gases. Ionization by secondary electrons, however, is not supported by spatiotemporal emission measurements, thus explanation may be sought in different processes such as development of double layers and increased field in the bulk. The current-to-voltage phase is much smaller than in electropositive gases, thus the discharge appears more resistive. For a range of operating conditions the phase even becomes inductive due to negative ion inertia.",
author = "Shigeru Kakuta and Petrović, {Zoran Lj} and Fumiyoshi Tochikubo and Toshiaki Makabe",
year = "1993",
doi = "10.1063/1.354326",
language = "English",
volume = "74",
pages = "4923--4931",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "8",

}

TY - JOUR

T1 - Influence of frequency, pressure, and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2-SF6 mixtures

AU - Kakuta, Shigeru

AU - Petrović, Zoran Lj

AU - Tochikubo, Fumiyoshi

AU - Makabe, Toshiaki

PY - 1993

Y1 - 1993

N2 - Electrical characteristics of rf discharges in SF6 and in its mixtures with N2 were experimentally investigated. In addition space- and time-resolved emission spectroscopy was used to gain a better understanding of kinetics of processes leading to various observed characteristics. A complicated dependence of minimum sustaining voltage on frequency was observed with a peak at 3 MHz. It was explained as the result of transition from the conditions where discharge is sustained by ionization in the bulk and the double-layer region to the conditions where secondary electron yield makes a large contribution. Another possible explanation is the one invoking transition from the conditions where at high-frequency double layer is formed by electron modulation to the condition where a double layer is formed by positive and negative ions. In voltage-current dependencies at 13 MHz two distinct regions were observed similar to the α to γ transitions observed for electropositive gases. Ionization by secondary electrons, however, is not supported by spatiotemporal emission measurements, thus explanation may be sought in different processes such as development of double layers and increased field in the bulk. The current-to-voltage phase is much smaller than in electropositive gases, thus the discharge appears more resistive. For a range of operating conditions the phase even becomes inductive due to negative ion inertia.

AB - Electrical characteristics of rf discharges in SF6 and in its mixtures with N2 were experimentally investigated. In addition space- and time-resolved emission spectroscopy was used to gain a better understanding of kinetics of processes leading to various observed characteristics. A complicated dependence of minimum sustaining voltage on frequency was observed with a peak at 3 MHz. It was explained as the result of transition from the conditions where discharge is sustained by ionization in the bulk and the double-layer region to the conditions where secondary electron yield makes a large contribution. Another possible explanation is the one invoking transition from the conditions where at high-frequency double layer is formed by electron modulation to the condition where a double layer is formed by positive and negative ions. In voltage-current dependencies at 13 MHz two distinct regions were observed similar to the α to γ transitions observed for electropositive gases. Ionization by secondary electrons, however, is not supported by spatiotemporal emission measurements, thus explanation may be sought in different processes such as development of double layers and increased field in the bulk. The current-to-voltage phase is much smaller than in electropositive gases, thus the discharge appears more resistive. For a range of operating conditions the phase even becomes inductive due to negative ion inertia.

UR - http://www.scopus.com/inward/record.url?scp=0012279803&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0012279803&partnerID=8YFLogxK

U2 - 10.1063/1.354326

DO - 10.1063/1.354326

M3 - Article

VL - 74

SP - 4923

EP - 4931

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 8

ER -