Influence of frequency, pressure, and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2-SF6 mixtures

Shigeru Kakuta, Zoran Lj Petrović, Fumiyoshi Tochikubo, Toshiaki Makabe

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Influence of frequency, pressure, and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N<sub>2</sub>-SF<sub>6</sub> mixtures'. Together they form a unique fingerprint.

Physics & Astronomy