Influence of gas pressure and magnetic field upon dc magnetron discharge

Eiji Shidoji, Kevin Ness, Toshiaki Makabe

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

We have proposed a hybrid model for dc magnetron discharge. Simulations of the discharges under different applied voltages are performed using the hybrid model. We confirm that this hybrid model is able to predict a magnetron discharge under conditions of less than 1 Pa by comparing the results from the simulation with that from the experiment. We also perform simulations of dc magnetron discharges under conditions of different gas pressures and different magnitudes of magnetic field. In so doing, we clarify the influence of gas pressure and magnetic field upon dc magnetron discharge.

Original languageEnglish
Pages (from-to)299-306
Number of pages8
JournalVacuum
Volume60
Issue number3
DOIs
Publication statusPublished - 2001 Mar

Keywords

  • Magnetron
  • Plasma
  • Simulation
  • Sputtering process

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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