Influence of trimethylsilane flow on the microstructure, mechanical and tribological properties of CrSiCN coatings in water lubrication

Zhiwei Wu, Fei Zhou, Qianzhi Wang, Zhifeng Zhou, Jiwang Yan, Lawrence Kwok Yan Li

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

CrSiCN coatings with different silicon and carbon contents were deposited on silicon wafers and 316L stainless steels using unbalanced magnetron sputtering via adjusting trimethylsilane (TMS) flow, and their microstructure and mechanical properties were characterized by X-ray diffraction (XRD), scanning electron microscopy(SEM), X-ray photoelectrons spectroscopy(XPS) and nano-indenter, respectively. The tribological properties of CrSiCN coatings sliding against SiC balls in water were investigated using ball-on-disk tribometer. The results showed that the CrSiCN coatings had fine composite microstructure consisting of nanocrystallites of Cr(C, N) crystal and amorphous phases such as a-Si3N4 and a-C(a-CNx). The typical columnar structures changed from fine cluster to coarse ones when the Si content was beyond 3.4 at.%. With an increase in the TMS flow, the hardness and Young's modulus of Corsican coatings all first increased, and then rapidly decreased, but the compressive stress in the coatings varied in the range of 2.8-4.8 GPa. When the TMS flow was 10 sccm, the CrSiCN coatings exhibited the highest hardness of 21.3 GPa and the lowest friction coefficient (0.11) and wear rate (8.4 × 10-8 mm3/N m). But when the TMS flow was beyond 15 sccm, the tribological properties of CrSiCN coatings in water became poor.

Original languageEnglish
Pages (from-to)516-530
Number of pages15
JournalApplied Surface Science
Volume355
DOIs
Publication statusPublished - 2015 Nov 15

Fingerprint

Lubrication
Coatings
Microstructure
Water
Hardness
Nanocrystallites
Stainless Steel
Silicon
Silicon wafers
Compressive stress
Magnetron sputtering
Carbon
Stainless steel
X ray photoelectron spectroscopy
Elastic moduli
Wear of materials
Friction
X ray diffraction
Mechanical properties
Crystals

Keywords

  • CrSiCN coatings
  • Microstructure
  • Nano-hardness
  • Tribological properties
  • Water lubrication

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

Influence of trimethylsilane flow on the microstructure, mechanical and tribological properties of CrSiCN coatings in water lubrication. / Wu, Zhiwei; Zhou, Fei; Wang, Qianzhi; Zhou, Zhifeng; Yan, Jiwang; Li, Lawrence Kwok Yan.

In: Applied Surface Science, Vol. 355, 15.11.2015, p. 516-530.

Research output: Contribution to journalArticle

Wu, Zhiwei ; Zhou, Fei ; Wang, Qianzhi ; Zhou, Zhifeng ; Yan, Jiwang ; Li, Lawrence Kwok Yan. / Influence of trimethylsilane flow on the microstructure, mechanical and tribological properties of CrSiCN coatings in water lubrication. In: Applied Surface Science. 2015 ; Vol. 355. pp. 516-530.
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