Infrared Photodetector with Copper Resonator in Silicon Nanohole Array

Shun Yasunaga, Tetsuo Kan, Hidetoshi Takahashi, Tomoyuki Takahata, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A silicon-based infrared photodetector with metal nanostructures has been drawing attention, while lacking sufficient responsivity. We hereby present a silicon-based infrared photodetector furnished with an array of a nano-scale copper plate which induces localized surface plasmon resonance (LSPR). Each plate is placed at the bottom of a nanohole on a silicon substrate. This device possesses two features: electrically-connected copper resonators and backside-illuminating configuration. They lead to efficient photocurrent generation. As LSPR couples with vertically incident light, this structure can be a solution of realizing a silicon-based infrared photodetector that can be adapted to prevalent semiconductor devices.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages633-636
Number of pages4
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - 2019 Jun
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 2019 Jun 232019 Jun 27

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period19/6/2319/6/27

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Keywords

  • Infrared photodetector
  • Schottky junction
  • backside illumination
  • localized surface plasmon resonance

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

Cite this

Yasunaga, S., Kan, T., Takahashi, H., Takahata, T., & Shimoyama, I. (2019). Infrared Photodetector with Copper Resonator in Silicon Nanohole Array. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 633-636). [8808478] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808478