Initial results of a full kinetic simulation of RF H - source including Coulomb collision process

S. Mochizuki, S. Mattei, T. Shibata, K. Nishida, Akiyoshi Hatayama, J. Lettry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

In order to evaluate Electron Energy Distribution Function (EEDF) more correctly for radio frequency inductively coupled plasma (RF-ICP) in hydrogen negative ion sources, the Electromagnetic Particle-In-Cell (EM-PIC) simulation code has been improved by taking into account electron-electron Coulomb collision. Binary collision model is employed to model Coulomb collision process and we have successfully modeled it. The preliminary calculation including Coulomb collision has been done and it is shown that Coulomb collision doesn't have significant effects under the condition: electron density n e ∼ 10 18 m -3 and high gas pressure pH 2 = 3 Pa, while it is necessary to include Coulomb collision under high electron density and low gas pressure conditions.

Original languageEnglish
Title of host publication4th International Symposium on Negative Ions, Beams and Sources, NIBS 2014
EditorsWerner Kraus, Paul McNeely
PublisherAmerican Institute of Physics Inc.
ISBN (Electronic)9780735412972
DOIs
Publication statusPublished - 2015 Apr 8
Event4th International Symposium on Negative Ions, Beams and Sources, NIBS 2014 - Garching, Germany
Duration: 2014 Oct 62014 Oct 10

Publication series

NameAIP Conference Proceedings
Volume1655
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference4th International Symposium on Negative Ions, Beams and Sources, NIBS 2014
CountryGermany
CityGarching
Period14/10/614/10/10

Fingerprint

Coulomb collisions
kinetics
simulation
gas pressure
hydrogen ions
negative ions
ion sources
radio frequencies
energy distribution
electrons
low pressure
distribution functions
electron energy
electromagnetism
collisions
cells

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Mochizuki, S., Mattei, S., Shibata, T., Nishida, K., Hatayama, A., & Lettry, J. (2015). Initial results of a full kinetic simulation of RF H - source including Coulomb collision process In W. Kraus, & P. McNeely (Eds.), 4th International Symposium on Negative Ions, Beams and Sources, NIBS 2014 [020016] (AIP Conference Proceedings; Vol. 1655). American Institute of Physics Inc.. https://doi.org/10.1063/1.4916425

Initial results of a full kinetic simulation of RF H - source including Coulomb collision process . / Mochizuki, S.; Mattei, S.; Shibata, T.; Nishida, K.; Hatayama, Akiyoshi; Lettry, J.

4th International Symposium on Negative Ions, Beams and Sources, NIBS 2014. ed. / Werner Kraus; Paul McNeely. American Institute of Physics Inc., 2015. 020016 (AIP Conference Proceedings; Vol. 1655).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mochizuki, S, Mattei, S, Shibata, T, Nishida, K, Hatayama, A & Lettry, J 2015, Initial results of a full kinetic simulation of RF H - source including Coulomb collision process in W Kraus & P McNeely (eds), 4th International Symposium on Negative Ions, Beams and Sources, NIBS 2014., 020016, AIP Conference Proceedings, vol. 1655, American Institute of Physics Inc., 4th International Symposium on Negative Ions, Beams and Sources, NIBS 2014, Garching, Germany, 14/10/6. https://doi.org/10.1063/1.4916425
Mochizuki S, Mattei S, Shibata T, Nishida K, Hatayama A, Lettry J. Initial results of a full kinetic simulation of RF H - source including Coulomb collision process In Kraus W, McNeely P, editors, 4th International Symposium on Negative Ions, Beams and Sources, NIBS 2014. American Institute of Physics Inc. 2015. 020016. (AIP Conference Proceedings). https://doi.org/10.1063/1.4916425
Mochizuki, S. ; Mattei, S. ; Shibata, T. ; Nishida, K. ; Hatayama, Akiyoshi ; Lettry, J. / Initial results of a full kinetic simulation of RF H - source including Coulomb collision process 4th International Symposium on Negative Ions, Beams and Sources, NIBS 2014. editor / Werner Kraus ; Paul McNeely. American Institute of Physics Inc., 2015. (AIP Conference Proceedings).
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