Interaction between free-surface oscillation and bubble translation in a megasonic cleaning bath

Yu Katano, Keita Ando

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Visualization experiments were performed to study the relation between free-surface motion and bubble translation in a 1-MHz ultrasonic cleaning bath. From the visualization with a video camera, the characteristic frequencies of the free-surface oscillation (under the acoustic radiation force) and the translational velocity of cavitation bubbles (trapped via the primary Bjerknes force) were extracted, showing that there is a strong correlation between the free-surface oscillation and bubble translation. From the context of megasonic cleaning, such free-surface oscillation is expected to contribute to uniform cleaning performance with cavitation bubbles.

Original languageEnglish
Title of host publicationUltra Clean Processing of Semiconductor Surfaces XV - Selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021
EditorsPaul W. Mertens, Kurt Wostyn, Marc Meuris, Marc Heyns
PublisherTrans Tech Publications Ltd
Pages202-206
Number of pages5
ISBN (Print)9783035738018
DOIs
Publication statusPublished - 2021
Event15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021 - Mechelen, Belgium
Duration: 2021 Apr 122021 Apr 15

Publication series

NameSolid State Phenomena
Volume314 SSP
ISSN (Print)1012-0394
ISSN (Electronic)1662-9779

Conference

Conference15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021
CountryBelgium
CityMechelen
Period21/4/1221/4/15

Keywords

  • Acoustic cavitation
  • Bubble translation
  • Free-surface oscillation
  • Megasonic cleaning bath

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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