Interfacial reactions and microstructure of BaTiO3 films prepared using fluoride precursor method

Shinobu Fujihara, Theodor Schneller, Rainer Waser

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Interfacial reactions of BaF2 and TiO2 were investigated in preparing BaTiO3 thin films using a fluoride precursor method. Trifluoroacetate solutions were prepared from barium acetate, titanium tetraisopropoxide (TTIP), and trifluoroacetic acid (TFA, CF 3COOH) with additives such as water and acetylacetone. The solutions were deposited on platinized Si wafers by spin-coating, were pyrolysed at 400 °C in air and were finally heated typically at 700 °C in a water vapor atmosphere. The perovskite BaTiO3 phase was obtained although a small portion of BaF2 remained unreacted. Thus, the films were characterized as the mixture of BaTiO3, BaF2, and amorphous TiO2. Influence of the solution chemistry on the phase evolution and microstructure was examined in order to discuss the reaction pathway of the perovskite phase.

Original languageEnglish
Pages (from-to)178-183
Number of pages6
JournalApplied Surface Science
Volume221
Issue number1-4
DOIs
Publication statusPublished - 2004 Jan 15

Fingerprint

Surface chemistry
Fluorides
fluorides
Trifluoroacetic Acid
Perovskite
microstructure
Microstructure
Trifluoroacetic acid
acetylacetone
Steam
Spin coating
Barium
Water vapor
barium
coating
water vapor
acetates
Acetates
titanium
Titanium

Keywords

  • Barium fluoride
  • Barium titanate
  • Sol-gel
  • Thin film

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Interfacial reactions and microstructure of BaTiO3 films prepared using fluoride precursor method. / Fujihara, Shinobu; Schneller, Theodor; Waser, Rainer.

In: Applied Surface Science, Vol. 221, No. 1-4, 15.01.2004, p. 178-183.

Research output: Contribution to journalArticle

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