Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy

F. Tochikubo, T. Kokubo, S. Kakuta, A. Suzuki, T. Makabe

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55 Citations (Scopus)

Abstract

The radio frequency glow discharge in Ar at 13.56 MHz has been investigated by using time- and space-resolved emission spectroscopy with a resolution of 0.2 ns. The relative net excitation rate is also obtained by deconvoluting the emission profile considering the effect of the lifetime. From these results, the authors are able to guess the electron transport and the temporal structure of the discharge. ArI(3p5to 1s4), ArI(2p2to 1s5) and ArII(4p4D7/2to 4s4P5/2) lines are selected for observation. The electrons with low energy, epsilon >14.57 eV, are transported corresponding to the phase of the current. The electrons with higher energy, M>35.05 eV, are observed at the phase corresponding to the applied voltage only when the aluminium electrode is used under the present experimental conditions. It is confirmed that the high-energy electrons are secondary electrons emitted from the electrode. The RF discharge in Ar at 13.56 MHz has two modes with a hysteresis loop as the function of input energy.

Original languageEnglish
Pages (from-to)1184-1192
Number of pages9
JournalJournal of Physics D: Applied Physics
Volume23
Issue number9
DOIs
Publication statusPublished - 1990 Sep 14

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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