Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy

Fumiyoshi Tochikubo, Terukazu Kokubo, Shigeru Kakuta, Akira Suzuki, Toshiaki Makabe

Research output: Contribution to journalArticle

55 Citations (Scopus)

Abstract

A diagnostic technique is discussed for RF glow discharge at 13.56 MHz, with a resolution of 0.2 ns, by a single-photon counting method. The experimental system and the procedure is described in detail. The time- and space-resolved optical emissions of Ar I and Ar II are observed in Ar at 13.56 MHz. In advance of technological applications for the development of plasma processing, investigation of the rare gas RF discharge will lead to a better understanding of the discharge structure and the density profile of the excited atom as well as the complicated chemical process. Discussion is focused on the electron transport owing to the difference in the electron energy, the sustaining mechanism of the RF discharge, and on the distribution of the excited species. Overall behaviour in Ar discharge at 13.56 MHz is investigated and discussed for Ar I and Ar II.

Original languageEnglish
Pages (from-to)1184-1192
Number of pages9
JournalJournal of Physics D: Applied Physics
Volume23
Issue number9
DOIs
Publication statusPublished - 1990 Jan 1

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Noble Gases
Plasma applications
Optical emission spectroscopy
Glow discharges
optical emission spectroscopy
Inert gases
glow discharges
Discharge (fluid mechanics)
Photons
Atoms
Electrons
sustaining
light emission
rare gases
counting
electron energy
Electron Transport
photons
profiles
atoms

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy. / Tochikubo, Fumiyoshi; Kokubo, Terukazu; Kakuta, Shigeru; Suzuki, Akira; Makabe, Toshiaki.

In: Journal of Physics D: Applied Physics, Vol. 23, No. 9, 01.01.1990, p. 1184-1192.

Research output: Contribution to journalArticle

Tochikubo, Fumiyoshi ; Kokubo, Terukazu ; Kakuta, Shigeru ; Suzuki, Akira ; Makabe, Toshiaki. / Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy. In: Journal of Physics D: Applied Physics. 1990 ; Vol. 23, No. 9. pp. 1184-1192.
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