Investigation of the ion ejection mechanism of gallium liquid metal ion sources

Yoshiyuki Nakayama, Toshiaki Makabe

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

A gallium liquid metal ion source and an ion energy analysis system were constructed in order to study the ion ejection mechanism. We have performed measurements of the energy distribution of 69Ga+ at elevated source temperatures up to 500 °C at a fixed ion current of 2 μA using a 127° electrostatic energy analyser. Results on the emitted ion energy distribution indicate that a notable secondary peak and a low energy tail are formed in addition to the main peak at source temperatures above 300 °C. The field evaporation, field ionization and charge transfer collision are discussed in detail as the ionization mechanisms of the emitted ion. The experimental evidence is presented for the field ionization process as one of the formation mechanisms of 69Ga+. A comparison between the experimental and theoretical distributions is also carried out.

Original languageEnglish
Pages (from-to)1769-1775
Number of pages7
JournalJournal of Physics D: Applied Physics
Volume26
Issue number10
DOIs
Publication statusPublished - 1993

Fingerprint

Gallium
Ion sources
liquid metals
Liquid metals
ejection
ion sources
gallium
Metal ions
metal ions
Ions
Ionization
ionization
energy distribution
ions
systems analysis
ion currents
energy
charge transfer
evaporation
Charge transfer

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Investigation of the ion ejection mechanism of gallium liquid metal ion sources. / Nakayama, Yoshiyuki; Makabe, Toshiaki.

In: Journal of Physics D: Applied Physics, Vol. 26, No. 10, 1993, p. 1769-1775.

Research output: Contribution to journalArticle

Nakayama, Yoshiyuki ; Makabe, Toshiaki. / Investigation of the ion ejection mechanism of gallium liquid metal ion sources. In: Journal of Physics D: Applied Physics. 1993 ; Vol. 26, No. 10. pp. 1769-1775.
@article{42c371a645da4a128755cdb964ce5be8,
title = "Investigation of the ion ejection mechanism of gallium liquid metal ion sources",
abstract = "A gallium liquid metal ion source and an ion energy analysis system were constructed in order to study the ion ejection mechanism. We have performed measurements of the energy distribution of 69Ga+ at elevated source temperatures up to 500 °C at a fixed ion current of 2 μA using a 127° electrostatic energy analyser. Results on the emitted ion energy distribution indicate that a notable secondary peak and a low energy tail are formed in addition to the main peak at source temperatures above 300 °C. The field evaporation, field ionization and charge transfer collision are discussed in detail as the ionization mechanisms of the emitted ion. The experimental evidence is presented for the field ionization process as one of the formation mechanisms of 69Ga+. A comparison between the experimental and theoretical distributions is also carried out.",
author = "Yoshiyuki Nakayama and Toshiaki Makabe",
year = "1993",
doi = "10.1088/0022-3727/26/10/034",
language = "English",
volume = "26",
pages = "1769--1775",
journal = "Journal Physics D: Applied Physics",
issn = "0022-3727",
publisher = "IOP Publishing Ltd.",
number = "10",

}

TY - JOUR

T1 - Investigation of the ion ejection mechanism of gallium liquid metal ion sources

AU - Nakayama, Yoshiyuki

AU - Makabe, Toshiaki

PY - 1993

Y1 - 1993

N2 - A gallium liquid metal ion source and an ion energy analysis system were constructed in order to study the ion ejection mechanism. We have performed measurements of the energy distribution of 69Ga+ at elevated source temperatures up to 500 °C at a fixed ion current of 2 μA using a 127° electrostatic energy analyser. Results on the emitted ion energy distribution indicate that a notable secondary peak and a low energy tail are formed in addition to the main peak at source temperatures above 300 °C. The field evaporation, field ionization and charge transfer collision are discussed in detail as the ionization mechanisms of the emitted ion. The experimental evidence is presented for the field ionization process as one of the formation mechanisms of 69Ga+. A comparison between the experimental and theoretical distributions is also carried out.

AB - A gallium liquid metal ion source and an ion energy analysis system were constructed in order to study the ion ejection mechanism. We have performed measurements of the energy distribution of 69Ga+ at elevated source temperatures up to 500 °C at a fixed ion current of 2 μA using a 127° electrostatic energy analyser. Results on the emitted ion energy distribution indicate that a notable secondary peak and a low energy tail are formed in addition to the main peak at source temperatures above 300 °C. The field evaporation, field ionization and charge transfer collision are discussed in detail as the ionization mechanisms of the emitted ion. The experimental evidence is presented for the field ionization process as one of the formation mechanisms of 69Ga+. A comparison between the experimental and theoretical distributions is also carried out.

UR - http://www.scopus.com/inward/record.url?scp=0027684622&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027684622&partnerID=8YFLogxK

U2 - 10.1088/0022-3727/26/10/034

DO - 10.1088/0022-3727/26/10/034

M3 - Article

AN - SCOPUS:0027684622

VL - 26

SP - 1769

EP - 1775

JO - Journal Physics D: Applied Physics

JF - Journal Physics D: Applied Physics

SN - 0022-3727

IS - 10

ER -