Investigation of the RF efficiency of inductively coupled hydrogen plasmas at 1MHz

D. Rauner, S. Mattei, S. Briefi, U. Fantz, A. Hatayama, J. Lettry, K. Nishida, M. Q. Tran

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Physics & Astronomy