Investigation of the RF efficiency of inductively coupled hydrogen plasmas at 1MHz

D. Rauner, S. Mattei, S. Briefi, U. Fantz, A. Hatayama, J. Lettry, K. Nishida, M. Q. Tran

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Investigation of the RF efficiency of inductively coupled hydrogen plasmas at 1MHz'. Together they form a unique fingerprint.

Physics & Astronomy