Ionic polymer metal composite (IPMC) for MEMS actuator and sensor

Hiroki Yanamori, Takuma Kobayashi, Masaki Omiya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

An ionic polymer-metal composite (IPMC) consisting of a thin perfuorinated ionomer membrane, electrodes plated on both faces, undergoes large bending motion when a small electric field is applied across its thickness in a hydrated state. On the other hand, when small load is applied on IPMC, the electric field is induced in the polymer membrane depending on the magnitude of loading. The characteristics of IPMC are ease of miniaturization, low density and mechanical flexibility. Therefore, it is considered to have a wide range of applications from MEMS sensors to actuators. In this paper, we developed the fabrication process of IPMC actuator with palladium electrodes, which have lower stiffness than the conventional IPMC actuator with Au or Pt electrodes. The deformation of IPMC actuator is evaluated under various solvents, various temperatures, and various frequencies of input voltages. We developed the numerical model of IPMC actuator that can change the solution temperature and the ion species and compared the simulation results to the experimental results.

Original languageEnglish
Title of host publicationASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011
Pages417-424
Number of pages8
Volume1
DOIs
Publication statusPublished - 2011
EventASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011 - Portland, OR, United States
Duration: 2011 Jul 62011 Jul 8

Other

OtherASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011
CountryUnited States
CityPortland, OR
Period11/7/611/7/8

Fingerprint

MEMS
Actuators
Sensors
Composite materials
Polymers
Metals
Electrodes
Electric fields
Membranes
Ionomers
Palladium
Numerical models
Stiffness
Fabrication
Temperature
Ions
Electric potential

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Yanamori, H., Kobayashi, T., & Omiya, M. (2011). Ionic polymer metal composite (IPMC) for MEMS actuator and sensor. In ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011 (Vol. 1, pp. 417-424) https://doi.org/10.1115/IPACK2011-52259

Ionic polymer metal composite (IPMC) for MEMS actuator and sensor. / Yanamori, Hiroki; Kobayashi, Takuma; Omiya, Masaki.

ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011. Vol. 1 2011. p. 417-424.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yanamori, H, Kobayashi, T & Omiya, M 2011, Ionic polymer metal composite (IPMC) for MEMS actuator and sensor. in ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011. vol. 1, pp. 417-424, ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011, Portland, OR, United States, 11/7/6. https://doi.org/10.1115/IPACK2011-52259
Yanamori H, Kobayashi T, Omiya M. Ionic polymer metal composite (IPMC) for MEMS actuator and sensor. In ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011. Vol. 1. 2011. p. 417-424 https://doi.org/10.1115/IPACK2011-52259
Yanamori, Hiroki ; Kobayashi, Takuma ; Omiya, Masaki. / Ionic polymer metal composite (IPMC) for MEMS actuator and sensor. ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011. Vol. 1 2011. pp. 417-424
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