Isotopically engineered silicon nanoelectronics

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Isotope engineering of silicon has been employed towards development of silicon-based quantum computers and complete modeling of nano-CMOS fabrication processes towards development of next-generation technology computer aided design (TCAD) systems.

Original languageEnglish
Title of host publicationTechnical Digest - International Electron Devices Meeting, IEDM
Pages303-306
Number of pages4
DOIs
Publication statusPublished - 2007
Event2007 IEEE International Electron Devices Meeting, IEDM - Washington, DC, United States
Duration: 2007 Dec 102007 Dec 12

Other

Other2007 IEEE International Electron Devices Meeting, IEDM
CountryUnited States
CityWashington, DC
Period07/12/1007/12/12

    Fingerprint

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Itoh, K. M. (2007). Isotopically engineered silicon nanoelectronics. In Technical Digest - International Electron Devices Meeting, IEDM (pp. 303-306). [4418931] https://doi.org/10.1109/IEDM.2007.4418931