Kinetic phenomena in electron transport in radio-frequency fields

Z. Lj Petrović, Z. M. Raspopović, S. Dujko, T. Makabe

Research output: Contribution to journalArticle

67 Citations (Scopus)

Abstract

We discuss the application of swarm physics based techniques to study the time resolved kinetic phenomena that may be of interest to modeling of radio-frequency (rf) plasma, the relevance of such studies for the data that are being used and models that are being developed. Kinetic phenomena may not be predicted by extrapolation of the dc data or single particle trajectories and require full kinetic treatment or detailed simulations. Our exact solutions to the Boltzmann equation by direct numerical procedure (DNP) and Monte Carlo simulations (MCSs) revealed such phenomena as: anomalous longitudinal diffusion, time resolved negative differential conductivity, absolute negative mobility in afterglow and in rf fields, complex waveforms of transport coefficients due to phases between electric and magnetic fields, due to cyclotronic motion and all the comparisons performed so far between the two techniques and with results of the exact solutions to the Boltzmann equation by the group from James Cook University have showed excellent agreement. While the data used nowadays in plasma modeling are basically for dc fields, one has to include effects due to magnetic and time resolved magnetic field and also the kinetic phenomena in plasma modeling as these may affect the electron transport in real collisional processing plasmas. Thus we believe that kinetic and Monte Carlo based codes should be tested against swarm transport benchmarks, including results for time resolved E(t) and E(t) × B(t) fields.

Original languageEnglish
Pages (from-to)1-25
Number of pages25
JournalApplied Surface Science
Volume192
Issue number1-4
DOIs
Publication statusPublished - 2002 May 30

Fingerprint

radio frequencies
Kinetics
kinetics
Boltzmann equation
electrons
Plasmas
Magnetic fields
Plasma applications
particle trajectories
afterglows
magnetic fields
Extrapolation
extrapolation
waveforms
Physics
simulation
transport properties
Electric fields
Trajectories
Electron Transport

Keywords

  • Electron
  • Kinetic phenomena
  • Radio-frequency

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Petrović, Z. L., Raspopović, Z. M., Dujko, S., & Makabe, T. (2002). Kinetic phenomena in electron transport in radio-frequency fields. Applied Surface Science, 192(1-4), 1-25. https://doi.org/10.1016/S0169-4332(02)00018-1

Kinetic phenomena in electron transport in radio-frequency fields. / Petrović, Z. Lj; Raspopović, Z. M.; Dujko, S.; Makabe, T.

In: Applied Surface Science, Vol. 192, No. 1-4, 30.05.2002, p. 1-25.

Research output: Contribution to journalArticle

Petrović, ZL, Raspopović, ZM, Dujko, S & Makabe, T 2002, 'Kinetic phenomena in electron transport in radio-frequency fields', Applied Surface Science, vol. 192, no. 1-4, pp. 1-25. https://doi.org/10.1016/S0169-4332(02)00018-1
Petrović, Z. Lj ; Raspopović, Z. M. ; Dujko, S. ; Makabe, T. / Kinetic phenomena in electron transport in radio-frequency fields. In: Applied Surface Science. 2002 ; Vol. 192, No. 1-4. pp. 1-25.
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