Kirigami-inspired Electrothermal Actuator for Motion Tracking Blood Flow Measurement

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A large stroke electrothermal MEMS actuator with small device footprint and low driving voltage has been proposed for motion tracking blood flow measurement. This paper reports this kirigami-inspired device design and simulation results of the proposed actuator.

Original languageEnglish
Title of host publicationOMN 2019 - 2019 International Conference on Optical MEMS and Nanophotonics, Proceedings
PublisherIEEE Computer Society
Pages152-153
Number of pages2
ISBN (Electronic)9781728145013
DOIs
Publication statusPublished - 2019 Jul
Event2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019 - Daejeon, Korea, Republic of
Duration: 2019 Jul 282019 Aug 1

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume2019-July
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019
Country/TerritoryKorea, Republic of
CityDaejeon
Period19/7/2819/8/1

Keywords

  • blood flow measurement
  • electrothemal actuator
  • kirigami
  • motion tracking

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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