Laser Direct Writing of Highly Crystalline Graphene on Polydimethylsiloxane for Fingertip-Sized Piezoelectric Sensors

Shuichiro Hayashi, Fumiya Morosawa, Mitsuhiro Terakawa

Research output: Contribution to journalArticlepeer-review

Abstract

The patterning of electrically conductive structures directly onto the polydimethylsiloxane (PDMS) surface is crucial for the realization of flexible and elastic devices. Herein, defocused femtosecond laser pulses are irradiated for the fabrication of highly crystalline graphitic carbon structures on PDMS and a high electrical conductivity of ≈51.6 S m−1 is achieved. Utilizing the elasticity of PDMS and the high conductivity of fabricated structures, a fingertip-sized pressure sensor, which can detect pressures as low as ≈0.1 Pa, is realized. Moreover, a novel ring-shaped heart rate (HR) monitor, capable of measuring the HR from the index finger, is demonstrated, indicating the potential of fabricated structures in miniature and wearable healthcare applications.

Original languageEnglish
Article number2100457
JournalAdvanced Engineering Materials
Volume23
Issue number10
DOIs
Publication statusPublished - 2021 Oct

Keywords

  • femtosecond lasers
  • flexible devices
  • laser direct writing
  • polydimethylsiloxane
  • pressure sensors

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

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