Laser-induced periodic structure formation in AlN ceramic

N. N. Nedyalkov, A. Dikovska, R. Nikov, G. Atanasova, S. Hayashi, M. Terakawa

Research output: Contribution to journalArticlepeer-review

Abstract

In this work, we show that nanosecond laser processing of aluminium nitride (AlN) ceramic by a Nd:YAG laser operated at the fundamental wavelength (1064 nm) leads to the formation of a conductive layer decorated by a ripples structure. The characteristic orientation of these structures is perpendicular to the incident laser polarization. The period of the ripples is lower than the laser wavelength, namely, about 830 nm. Such structuring is observed after processing both in air and in vacuum. We discuss the mechanism of periodic structures formation based on the dependence of the surface morphology on the laser pulse number and fluence applied and the results of a simulation using the finite-difference time-domain approach. These results can form the basis of fabricating aluminium micro- and nanostructures with potential applications in electronics and photonics as systems for UV plasmonics.

Original languageEnglish
Article number107402
JournalOptics and Laser Technology
Volume144
DOIs
Publication statusPublished - 2021 Dec

Keywords

  • AlN decomposition
  • Laser processing of ceramics
  • Ripples formation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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