Linearity and heat resisting improvement low-voltage fluid-based inclination sensor by using silica coating process

Asrulnizam Bin Abd Manaf, Othman Sidek, Yoshinori Matsumoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we proposed a sealing technique for a sealing glass cap with a ceramic substrate by using silica coating liquid to increase the performance of fluid-based inclination sensor in heat-resisting and durability characteristic. The sensor was developed with one-side-electrode-type structure and propylene carbonate was used as electrolyte. The sensor uses capacitance change to detect the angle of inclination, and it is capable measuring inclination at supply voltage 1.5 V. The diameter of glass cap and height were 4.0 mm and 2.0 mm, respectively. The linearity of characteristic can be improved when the supply voltage was set at 1.5 V. The sensitivity , response time and resolution of sensor were 4 mV/deg, 0.6 s and 1.8 deg, respectively at the supply voltage 1.5 V. The temperature characteristic was evaluated between -10 °C to 50°C.

Original languageEnglish
Title of host publicationIEEE Sensors 2009 Conference - SENSORS 2009
Pages168-172
Number of pages5
DOIs
Publication statusPublished - 2009 Dec 1
EventIEEE Sensors 2009 Conference - SENSORS 2009 - Christchurch, New Zealand
Duration: 2009 Oct 252009 Oct 28

Publication series

NameProceedings of IEEE Sensors

Other

OtherIEEE Sensors 2009 Conference - SENSORS 2009
CountryNew Zealand
CityChristchurch
Period09/10/2509/10/28

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Manaf, A. B. A., Sidek, O., & Matsumoto, Y. (2009). Linearity and heat resisting improvement low-voltage fluid-based inclination sensor by using silica coating process. In IEEE Sensors 2009 Conference - SENSORS 2009 (pp. 168-172). [5398206] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2009.5398206