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Lithography with UV-LED array for curved surface structure
S. Suzuki,
Y. Matsumoto
Department of Applied Physics and Physico-Informatics
Research output
:
Contribution to journal
›
Article
›
peer-review
24
Citations (Scopus)
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Dive into the research topics of 'Lithography with UV-LED array for curved surface structure'. Together they form a unique fingerprint.
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Physics & Astronomy
curved surfaces
99%
lithography
69%
light emitting diodes
66%
lenses
60%
high aspect ratio
59%
gray scale
35%
sensors
33%
fabrication
33%
hemispheres
31%
directivity
30%
resins
27%
congressional reports
25%
cones
23%
masks
23%
wafers
20%
dosage
18%
silicon
14%
Engineering & Materials Science
Surface structure
100%
Lithography
90%
Lenses
84%
Light emitting diodes
82%
Aspect ratio
51%
Fabrication
40%
Optical devices
35%
Silicon wafers
33%
Sensors
28%
Molding
28%
Masks
26%
Cones
26%
Resins
24%
Chemical Compounds
Surface Structure
80%
Dose
21%
Shape
18%
Time
9%
Surface
8%