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Lithography with UV-LED array for curved surface structure
S. Suzuki,
Y. Matsumoto
Department of Applied Physics and Physico-Informatics
Research output
:
Contribution to journal
›
Article
›
peer-review
25
Citations (Scopus)
Overview
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Dive into the research topics of 'Lithography with UV-LED array for curved surface structure'. Together they form a unique fingerprint.
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Physics & Astronomy
cones
23%
congressional reports
25%
curved surfaces
99%
directivity
30%
dosage
18%
fabrication
33%
gray scale
35%
hemispheres
31%
high aspect ratio
59%
lenses
60%
light emitting diodes
66%
lithography
69%
masks
23%
resins
27%
sensors
33%
silicon
14%
wafers
20%
Engineering & Materials Science
Aspect ratio
51%
Cones
26%
Fabrication
40%
Lenses
84%
Light emitting diodes
82%
Lithography
90%
Masks
26%
Molding
28%
Optical devices
35%
Resins
24%
Sensors
28%
Silicon wafers
33%
Surface structure
100%
Chemical Compounds
Dose
21%
Shape
18%
Surface
8%
Surface Structure
80%
Time
9%