Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces

Tetsuo Kan; Akihiro Isozaki; Hidetoshi Takahashi; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2014.6765790

Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces

Tetsuo Kan, Akihiro Isozaki, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We propose an out-of-plane MEMS actuator with a large stroke length comparable to the size of the actuator itself. The proposed device is actuated by the combined forces of the electrostatic and the pneumatic forces. This combination of two independent forces enlarges a stable area during the actuation, resulting in a large stroke which is difficult to be achieved with only either force. The 3D profiling by the laser scanning microscopy confirmed the largest stroke of 103 μm was obtained with the 150-μm-diameter actuator area with the electric field of 5.8 × 10⁵ V/m (330V between the electrodes) and the air pressure of 2.0 kPa.

Original language	English
Title of host publication	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	913-916
Number of pages	4
ISBN (Print)	9781479935086
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765790
Publication status	Published - 2014 Jan 1
Externally published	Yes
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States Duration: 2014 Jan 26 → 2014 Jan 30

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/Territory	United States
City	San Francisco, CA
Period	14/1/26 → 14/1/30

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2014.6765790

Cite this

Kan, T., Isozaki, A., Takahashi, H., Matsumoto, K., & Shimoyama, I. (2014). Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 913-916). [6765790] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765790

Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces. / Kan, Tetsuo; Isozaki, Akihiro; Takahashi, Hidetoshi et al.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 913-916 6765790 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kan, T, Isozaki, A, Takahashi, H, Matsumoto, K & Shimoyama, I 2014, Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765790, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 913-916, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765790

Kan T, Isozaki A, Takahashi H, Matsumoto K, Shimoyama I. Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 913-916. 6765790. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765790

Kan, Tetsuo ; Isozaki, Akihiro ; Takahashi, Hidetoshi et al. / Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 913-916 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "We propose an out-of-plane MEMS actuator with a large stroke length comparable to the size of the actuator itself. The proposed device is actuated by the combined forces of the electrostatic and the pneumatic forces. This combination of two independent forces enlarges a stable area during the actuation, resulting in a large stroke which is difficult to be achieved with only either force. The 3D profiling by the laser scanning microscopy confirmed the largest stroke of 103 μm was obtained with the 150-μm-diameter actuator area with the electric field of 5.8 × 105 V/m (330V between the electrodes) and the air pressure of 2.0 kPa.",

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AB - We propose an out-of-plane MEMS actuator with a large stroke length comparable to the size of the actuator itself. The proposed device is actuated by the combined forces of the electrostatic and the pneumatic forces. This combination of two independent forces enlarges a stable area during the actuation, resulting in a large stroke which is difficult to be achieved with only either force. The 3D profiling by the laser scanning microscopy confirmed the largest stroke of 103 μm was obtained with the 150-μm-diameter actuator area with the electric field of 5.8 × 105 V/m (330V between the electrodes) and the air pressure of 2.0 kPa.

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Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces

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