Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces

Tetsuo Kan, Akihiro Isozaki, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose an out-of-plane MEMS actuator with a large stroke length comparable to the size of the actuator itself. The proposed device is actuated by the combined forces of the electrostatic and the pneumatic forces. This combination of two independent forces enlarges a stable area during the actuation, resulting in a large stroke which is difficult to be achieved with only either force. The 3D profiling by the laser scanning microscopy confirmed the largest stroke of 103 μm was obtained with the 150-μm-diameter actuator area with the electric field of 5.8 × 105 V/m (330V between the electrodes) and the air pressure of 2.0 kPa.

Original languageEnglish
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages913-916
Number of pages4
ISBN (Print)9781479935086
DOIs
Publication statusPublished - 2014 Jan 1
Externally publishedYes
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: 2014 Jan 262014 Jan 30

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
CountryUnited States
CitySan Francisco, CA
Period14/1/2614/1/30

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Long stroke out-of-plane actuator using combination of electrostatic and pneumatic forces'. Together they form a unique fingerprint.

Cite this