@inproceedings{66dcb006b14a47b39fb525b06cd4dd0d,
title = "Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets",
abstract = "Ppm-level hydrogen and ammonia in air were recognized by low-power, integrated sensors consisting of catalytic metal nanosheets. Thermal energy necessary for catalytic reactions were given by Joule heating not by external heaters. The ther-mal-aware design of sensors reduces the power consumption to 0.14 mW. The low-power and small-area properties enable large-scale, on-chip integration of molecular sensors, which will be useful in IoT era. A sensor array was successfully connected to a platform with wireless connectivity.",
keywords = "Gas Sensor, Nanosheet, Self-Heating",
author = "T. Tanaka and K. Tabuchi and K. Tatehora and Y. Shiiki and S. Nakagawa and Tsunaki Takahashi and R. Shimizu and H. Ishikuro and T. Kuroda and T. Yanagida and Ken Uchida",
year = "2019",
month = jun,
doi = "10.23919/VLSIT.2019.8776552",
language = "English",
series = "Digest of Technical Papers - Symposium on VLSI Technology",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "T158--T159",
booktitle = "2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers",
note = "39th Symposium on VLSI Technology, VLSI Technology 2019 ; Conference date: 09-06-2019 Through 14-06-2019",
}