Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets

Takahisa Tanaka, K. Tabuchi, K. Tatehora, Y. Shiiki, S. Nakagawa, T. Takahashi, R. Shimizu, H. Ishikuro, Tadahiro Kuroda, T. Yanagida, K. Uchida

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Ppm-level hydrogen and ammonia in air were recognized by low-power, integrated sensors consisting of catalytic metal nanosheets. Thermal energy necessary for catalytic reactions were given by Joule heating not by external heaters. The ther-mal-aware design of sensors reduces the power consumption to 0.14 mW. The low-power and small-area properties enable large-scale, on-chip integration of molecular sensors, which will be useful in IoT era. A sensor array was successfully connected to a platform with wireless connectivity.

Original languageEnglish
Title of host publication2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
PagesT158-T159
ISBN (Electronic)9784863487178
DOIs
Publication statusPublished - 2019 Jun 1
Event39th Symposium on VLSI Technology, VLSI Technology 2019 - Kyoto, Japan
Duration: 2019 Jun 92019 Jun 14

Publication series

NameDigest of Technical Papers - Symposium on VLSI Technology
Volume2019-June
ISSN (Print)0743-1562

Conference

Conference39th Symposium on VLSI Technology, VLSI Technology 2019
CountryJapan
CityKyoto
Period19/6/919/6/14

Keywords

  • Gas Sensor
  • Nanosheet
  • Self-Heating

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Tanaka, T., Tabuchi, K., Tatehora, K., Shiiki, Y., Nakagawa, S., Takahashi, T., Shimizu, R., Ishikuro, H., Kuroda, T., Yanagida, T., & Uchida, K. (2019). Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. In 2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers (pp. T158-T159). [8776552] (Digest of Technical Papers - Symposium on VLSI Technology; Vol. 2019-June). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/VLSIT.2019.8776552