Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets

T. Tanaka, K. Tabuchi, K. Tatehora, Y. Shiiki, S. Nakagawa, T. Takahashi, R. Shimizu, Hiroki Ishikuro, Tadahiro Kuroda, T. Yanagida, K. Uchida

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Ppm-level hydrogen and ammonia in air were recognized by low-power, integrated sensors consisting of catalytic metal nanosheets. Thermal energy necessary for catalytic reactions were given by Joule heating not by external heaters. The ther-mal-aware design of sensors reduces the power consumption to 0.14 mW. The low-power and small-area properties enable large-scale, on-chip integration of molecular sensors, which will be useful in IoT era. A sensor array was successfully connected to a platform with wireless connectivity.

Original languageEnglish
Title of host publication2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
PagesT158-T159
ISBN (Electronic)9784863487178
DOIs
Publication statusPublished - 2019 Jun 1
Event39th Symposium on VLSI Technology, VLSI Technology 2019 - Kyoto, Japan
Duration: 2019 Jun 92019 Jun 14

Publication series

NameDigest of Technical Papers - Symposium on VLSI Technology
Volume2019-June
ISSN (Print)0743-1562

Conference

Conference39th Symposium on VLSI Technology, VLSI Technology 2019
CountryJapan
CityKyoto
Period19/6/919/6/14

Fingerprint

Nanosheets
Molecules
Sensors
Metals
Gases
Joule heating
Sensor arrays
Thermal energy
Ammonia
Electric power utilization
Hydrogen
Air

Keywords

  • Gas Sensor
  • Nanosheet
  • Self-Heating

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Tanaka, T., Tabuchi, K., Tatehora, K., Shiiki, Y., Nakagawa, S., Takahashi, T., ... Uchida, K. (2019). Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. In 2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers (pp. T158-T159). [8776552] (Digest of Technical Papers - Symposium on VLSI Technology; Vol. 2019-June). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/VLSIT.2019.8776552

Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. / Tanaka, T.; Tabuchi, K.; Tatehora, K.; Shiiki, Y.; Nakagawa, S.; Takahashi, T.; Shimizu, R.; Ishikuro, Hiroki; Kuroda, Tadahiro; Yanagida, T.; Uchida, K.

2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2019. p. T158-T159 8776552 (Digest of Technical Papers - Symposium on VLSI Technology; Vol. 2019-June).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tanaka, T, Tabuchi, K, Tatehora, K, Shiiki, Y, Nakagawa, S, Takahashi, T, Shimizu, R, Ishikuro, H, Kuroda, T, Yanagida, T & Uchida, K 2019, Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. in 2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers., 8776552, Digest of Technical Papers - Symposium on VLSI Technology, vol. 2019-June, Institute of Electrical and Electronics Engineers Inc., pp. T158-T159, 39th Symposium on VLSI Technology, VLSI Technology 2019, Kyoto, Japan, 19/6/9. https://doi.org/10.23919/VLSIT.2019.8776552
Tanaka T, Tabuchi K, Tatehora K, Shiiki Y, Nakagawa S, Takahashi T et al. Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. In 2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2019. p. T158-T159. 8776552. (Digest of Technical Papers - Symposium on VLSI Technology). https://doi.org/10.23919/VLSIT.2019.8776552
Tanaka, T. ; Tabuchi, K. ; Tatehora, K. ; Shiiki, Y. ; Nakagawa, S. ; Takahashi, T. ; Shimizu, R. ; Ishikuro, Hiroki ; Kuroda, Tadahiro ; Yanagida, T. ; Uchida, K. / Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. 2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2019. pp. T158-T159 (Digest of Technical Papers - Symposium on VLSI Technology).
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