Abstract
Ppm-level hydrogen and ammonia in air were recognized by low-power, integrated sensors consisting of catalytic metal nanosheets. Thermal energy necessary for catalytic reactions were given by Joule heating not by external heaters. The ther-mal-aware design of sensors reduces the power consumption to 0.14 mW. The low-power and small-area properties enable large-scale, on-chip integration of molecular sensors, which will be useful in IoT era. A sensor array was successfully connected to a platform with wireless connectivity.
| Original language | English |
|---|---|
| Title of host publication | 2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | T158-T159 |
| ISBN (Electronic) | 9784863487178 |
| DOIs | |
| Publication status | Published - 2019 Jun 1 |
| Event | 39th Symposium on VLSI Technology, VLSI Technology 2019 - Kyoto, Japan Duration: 2019 Jun 9 → 2019 Jun 14 |
Publication series
| Name | Digest of Technical Papers - Symposium on VLSI Technology |
|---|---|
| Volume | 2019-June |
| ISSN (Print) | 0743-1562 |
Conference
| Conference | 39th Symposium on VLSI Technology, VLSI Technology 2019 |
|---|---|
| Country | Japan |
| City | Kyoto |
| Period | 19/6/9 → 19/6/14 |
Fingerprint
Keywords
- Gas Sensor
- Nanosheet
- Self-Heating
ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. / Tanaka, T.; Tabuchi, K.; Tatehora, K.; Shiiki, Y.; Nakagawa, S.; Takahashi, T.; Shimizu, R.; Ishikuro, Hiroki; Kuroda, Tadahiro; Yanagida, T.; Uchida, K.
2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2019. p. T158-T159 8776552 (Digest of Technical Papers - Symposium on VLSI Technology; Vol. 2019-June).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets
AU - Tanaka, T.
AU - Tabuchi, K.
AU - Tatehora, K.
AU - Shiiki, Y.
AU - Nakagawa, S.
AU - Takahashi, T.
AU - Shimizu, R.
AU - Ishikuro, Hiroki
AU - Kuroda, Tadahiro
AU - Yanagida, T.
AU - Uchida, K.
PY - 2019/6/1
Y1 - 2019/6/1
N2 - Ppm-level hydrogen and ammonia in air were recognized by low-power, integrated sensors consisting of catalytic metal nanosheets. Thermal energy necessary for catalytic reactions were given by Joule heating not by external heaters. The ther-mal-aware design of sensors reduces the power consumption to 0.14 mW. The low-power and small-area properties enable large-scale, on-chip integration of molecular sensors, which will be useful in IoT era. A sensor array was successfully connected to a platform with wireless connectivity.
AB - Ppm-level hydrogen and ammonia in air were recognized by low-power, integrated sensors consisting of catalytic metal nanosheets. Thermal energy necessary for catalytic reactions were given by Joule heating not by external heaters. The ther-mal-aware design of sensors reduces the power consumption to 0.14 mW. The low-power and small-area properties enable large-scale, on-chip integration of molecular sensors, which will be useful in IoT era. A sensor array was successfully connected to a platform with wireless connectivity.
KW - Gas Sensor
KW - Nanosheet
KW - Self-Heating
UR - http://www.scopus.com/inward/record.url?scp=85070303107&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85070303107&partnerID=8YFLogxK
U2 - 10.23919/VLSIT.2019.8776552
DO - 10.23919/VLSIT.2019.8776552
M3 - Conference contribution
AN - SCOPUS:85070303107
T3 - Digest of Technical Papers - Symposium on VLSI Technology
SP - T158-T159
BT - 2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers
PB - Institute of Electrical and Electronics Engineers Inc.
ER -