Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets

T. Tanaka; K. Tabuchi; K. Tatehora; Y. Shiiki; S. Nakagawa; Tsunaki Takahashi; R. Shimizu; H. Ishikuro; T. Kuroda; T. Yanagida; Ken Uchida

doi:10.23919/VLSIT.2019.8776552

Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets

T. Tanaka, K. Tabuchi, K. Tatehora, Y. Shiiki, S. Nakagawa, Tsunaki Takahashi, R. Shimizu, H. Ishikuro, T. Kuroda, T. Yanagida, Ken Uchida

Department of Electronics and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

Ppm-level hydrogen and ammonia in air were recognized by low-power, integrated sensors consisting of catalytic metal nanosheets. Thermal energy necessary for catalytic reactions were given by Joule heating not by external heaters. The ther-mal-aware design of sensors reduces the power consumption to 0.14 mW. The low-power and small-area properties enable large-scale, on-chip integration of molecular sensors, which will be useful in IoT era. A sensor array was successfully connected to a platform with wireless connectivity.

Original language	English
Title of host publication	2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	T158-T159
ISBN (Electronic)	9784863487178
DOIs	https://doi.org/10.23919/VLSIT.2019.8776552
Publication status	Published - 2019 Jun
Event	39th Symposium on VLSI Technology, VLSI Technology 2019 - Kyoto, Japan Duration: 2019 Jun 9 → 2019 Jun 14

Publication series

Name	Digest of Technical Papers - Symposium on VLSI Technology
Volume	2019-June
ISSN (Print)	0743-1562

Conference

Conference	39th Symposium on VLSI Technology, VLSI Technology 2019
Country	Japan
City	Kyoto
Period	19/6/9 → 19/6/14

Keywords

Gas Sensor
Nanosheet
Self-Heating

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.23919/VLSIT.2019.8776552

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Cite this

Tanaka, T., Tabuchi, K., Tatehora, K., Shiiki, Y., Nakagawa, S., Takahashi, T., Shimizu, R., Ishikuro, H., Kuroda, T., Yanagida, T., & Uchida, K. (2019). Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. In 2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers (pp. T158-T159). [8776552] (Digest of Technical Papers - Symposium on VLSI Technology; Vol. 2019-June). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/VLSIT.2019.8776552

Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. / Tanaka, T.; Tabuchi, K.; Tatehora, K.; Shiiki, Y.; Nakagawa, S.; Takahashi, Tsunaki; Shimizu, R.; Ishikuro, H.; Kuroda, T.; Yanagida, T.; Uchida, Ken.

2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2019. p. T158-T159 8776552 (Digest of Technical Papers - Symposium on VLSI Technology; Vol. 2019-June).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tanaka, T, Tabuchi, K, Tatehora, K, Shiiki, Y, Nakagawa, S, Takahashi, T, Shimizu, R, Ishikuro, H, Kuroda, T, Yanagida, T & Uchida, K 2019, Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. in 2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers., 8776552, Digest of Technical Papers - Symposium on VLSI Technology, vol. 2019-June, Institute of Electrical and Electronics Engineers Inc., pp. T158-T159, 39th Symposium on VLSI Technology, VLSI Technology 2019, Kyoto, Japan, 19/6/9. https://doi.org/10.23919/VLSIT.2019.8776552

Tanaka T, Tabuchi K, Tatehora K, Shiiki Y, Nakagawa S, Takahashi T et al. Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. In 2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2019. p. T158-T159. 8776552. (Digest of Technical Papers - Symposium on VLSI Technology). https://doi.org/10.23919/VLSIT.2019.8776552

Tanaka, T. ; Tabuchi, K. ; Tatehora, K. ; Shiiki, Y. ; Nakagawa, S. ; Takahashi, Tsunaki ; Shimizu, R. ; Ishikuro, H. ; Kuroda, T. ; Yanagida, T. ; Uchida, Ken. / Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. 2019 Symposium on VLSI Technology, VLSI Technology 2019 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2019. pp. T158-T159 (Digest of Technical Papers - Symposium on VLSI Technology).

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