Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets

T. Tanaka, K. Tabuchi, K. Tatehora, Y. Shiiki, S. Nakagawa, T. Takahashi, R. Shimizu, H. Ishikuro, T. Kuroda, T. Yanagida, Ken Uchida

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Ppm-level hydrogen and ammonia in air were recognized by low-power, integrated sensors consisting of catalytic metal nanosheets. Thermal energy necessary for catalytic reactions were given by Joule heating not by external heaters. The thermal-aware design of sensors reduces the power consumption to 0.14 mW. The low-power and small-area properties enable large-scale, on-chip integration of molecular sensors, which will be useful in IoT era. A sensor array was successfully connected to a platform with wireless connectivity.

Original languageEnglish
Title of host publication2019 Symposium on VLSI Circuits, VLSI Circuits 2019 - Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
PagesT158-T159
ISBN (Electronic)9784863487185
DOIs
Publication statusPublished - 2019 Jun
Event33rd Symposium on VLSI Circuits, VLSI Circuits 2019 - Kyoto, Japan
Duration: 2019 Jun 92019 Jun 14

Publication series

NameIEEE Symposium on VLSI Circuits, Digest of Technical Papers
Volume2019-June

Conference

Conference33rd Symposium on VLSI Circuits, VLSI Circuits 2019
CountryJapan
CityKyoto
Period19/6/919/6/14

Keywords

  • Gas Sensor
  • Nanosheet
  • Self-Heating

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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  • Cite this

    Tanaka, T., Tabuchi, K., Tatehora, K., Shiiki, Y., Nakagawa, S., Takahashi, T., Shimizu, R., Ishikuro, H., Kuroda, T., Yanagida, T., & Uchida, K. (2019). Low-Power and ppm-Level Detection of Gas Molecules by Integrated Metal Nanosheets. In 2019 Symposium on VLSI Circuits, VLSI Circuits 2019 - Digest of Technical Papers (pp. T158-T159). [8778016] (IEEE Symposium on VLSI Circuits, Digest of Technical Papers; Vol. 2019-June). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/VLSIC.2019.8778016