Low-Power and ppm-Level Multimolecule Detection by Integration of Self-Heated Metal Nanosheet Sensors

Takahisa Tanaka, Takeshi Yanagida, Ken Uchida, Kenta Tabuchi, Kohei Tatehora, Yohsuke Shiiki, Shuya Nakagawa, Tsunaki Takahashi, Ryota Shimizu, Hiroki Ishikuro, Tadahiro Kuroda

Research output: Contribution to journalArticle

Abstract

H2 and NH3 detection with low power consumption was demonstrated by integrated chemiresistive Pt and PtRh nanosheet sensors on glass substrates. The self-heating effects realized low power and local heating of metal nanosheet sensors, enabling the integration of sensors with different operating temperatures. Based on different resistance changes in Pt and PtRh nanosheets toward H2 and NH3, the concentration of each gas was detected from a gas mixture by consuming around 1-mW power. For decreasing the power consumption and further integration of sensors, sensor scaling and pulsed operations were numerically and experimentally studied. In addition to good connectivity of metal nanosheet sensors to large-scale integration (LSI) circuits, improvements of the power consumption by sensor scaling were proven. The pulsed operations required for integrated sensor arrays maintained a sensor response, or a resistance change, of approximately 60%, even when the power consumption was reduced by 20%.

Original languageEnglish
Article number8887245
Pages (from-to)5393-5398
Number of pages6
JournalIEEE Transactions on Electron Devices
Volume66
Issue number12
DOIs
Publication statusPublished - 2019 Dec

Keywords

  • Gas sensors
  • nanosheet
  • self-heating
  • sensor arrays

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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    Tanaka, T., Yanagida, T., Uchida, K., Tabuchi, K., Tatehora, K., Shiiki, Y., Nakagawa, S., Takahashi, T., Shimizu, R., Ishikuro, H., & Kuroda, T. (2019). Low-Power and ppm-Level Multimolecule Detection by Integration of Self-Heated Metal Nanosheet Sensors. IEEE Transactions on Electron Devices, 66(12), 5393-5398. [8887245]. https://doi.org/10.1109/TED.2019.2945932