Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing

Daisuke Yokoyama, Takayuki Iwasaki, Tsuyoshi Yoshida, Hiroshi Kawarada, Shintaro Sato, Takashi Hyakushima, Mizuhisa Nihei, Yuji Awano

Research output: Contribution to journalArticlepeer-review

103 Citations (Scopus)

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Physics & Astronomy