Low-temperature growth of multiwalled carbon nanotubes by surface-wave plasma-enhanced chemical vapor deposition using catalyst nanoparticles

Masayuki Katagiri; Naoshi Sakuma; Yuichi Yamazaki; Mariko Suzuki; Shintaro Sato; Mizuhisa Nihei; Tadashi Sakai; Yuji Awano

doi:10.1143/JJAP.48.090205

Low-temperature growth of multiwalled carbon nanotubes by surface-wave plasma-enhanced chemical vapor deposition using catalyst nanoparticles

Masayuki Katagiri, Naoshi Sakuma, Yuichi Yamazaki, Mariko Suzuki, Shintaro Sato, Mizuhisa Nihei, Tadashi Sakai, Yuji Awano

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Carbon nanotubes (CNTs) have been grown by surface-wave plasma-enhanced chemical vapor deposition (CVD) using size-classified Co nanoparticles at low temperatures. A mesh grid is used in the remote plasma-enhanced CVD system for the suppression of ion bombardment damage from plasma. The control of the electric field distribution using a mesh grid with a narrower opening is effective for the CNT growth. Multiwalled CNTs are obtained at a low temperature of 400 °C under low ion-density conditions. No significant difference in the microscopic structure of the CNTs grown at temperatures between 400 and 500 °C is observed.

Original language	English
Pages (from-to)	902051-902053
Number of pages	3
Journal	Japanese journal of applied physics
Volume	48
Issue number	9 Part 1
DOIs	https://doi.org/10.1143/JJAP.48.090205
Publication status	Published - 2009 Dec 1
Externally published	Yes

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.48.090205

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abstract = "Carbon nanotubes (CNTs) have been grown by surface-wave plasma-enhanced chemical vapor deposition (CVD) using size-classified Co nanoparticles at low temperatures. A mesh grid is used in the remote plasma-enhanced CVD system for the suppression of ion bombardment damage from plasma. The control of the electric field distribution using a mesh grid with a narrower opening is effective for the CNT growth. Multiwalled CNTs are obtained at a low temperature of 400 °C under low ion-density conditions. No significant difference in the microscopic structure of the CNTs grown at temperatures between 400 and 500 °C is observed.",

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T1 - Low-temperature growth of multiwalled carbon nanotubes by surface-wave plasma-enhanced chemical vapor deposition using catalyst nanoparticles

AU - Katagiri, Masayuki

AU - Sakuma, Naoshi

AU - Yamazaki, Yuichi

AU - Suzuki, Mariko

AU - Sato, Shintaro

AU - Nihei, Mizuhisa

AU - Sakai, Tadashi

AU - Awano, Yuji

PY - 2009/12/1

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AB - Carbon nanotubes (CNTs) have been grown by surface-wave plasma-enhanced chemical vapor deposition (CVD) using size-classified Co nanoparticles at low temperatures. A mesh grid is used in the remote plasma-enhanced CVD system for the suppression of ion bombardment damage from plasma. The control of the electric field distribution using a mesh grid with a narrower opening is effective for the CNT growth. Multiwalled CNTs are obtained at a low temperature of 400 °C under low ion-density conditions. No significant difference in the microscopic structure of the CNTs grown at temperatures between 400 and 500 °C is observed.

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Low-temperature growth of multiwalled carbon nanotubes by surface-wave plasma-enhanced chemical vapor deposition using catalyst nanoparticles

Abstract

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