Low-temperature growth of multiwalled carbon nanotubes by surface-wave plasma-enhanced chemical vapor deposition using catalyst nanoparticles

Masayuki Katagiri, Naoshi Sakuma, Yuichi Yamazaki, Mariko Suzuki, Shintaro Sato, Mizuhisa Nihei, Tadashi Sakai, Yuji Awano

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Carbon nanotubes (CNTs) have been grown by surface-wave plasma-enhanced chemical vapor deposition (CVD) using size-classified Co nanoparticles at low temperatures. A mesh grid is used in the remote plasma-enhanced CVD system for the suppression of ion bombardment damage from plasma. The control of the electric field distribution using a mesh grid with a narrower opening is effective for the CNT growth. Multiwalled CNTs are obtained at a low temperature of 400 °C under low ion-density conditions. No significant difference in the microscopic structure of the CNTs grown at temperatures between 400 and 500 °C is observed.

Original languageEnglish
Pages (from-to)902051-902053
Number of pages3
JournalJapanese Journal of Applied Physics
Volume48
Issue number9 Part 1
DOIs
Publication statusPublished - 2009
Externally publishedYes

Fingerprint

Multiwalled carbon nanotubes (MWCN)
Growth temperature
Plasma enhanced chemical vapor deposition
Surface waves
surface waves
Carbon nanotubes
carbon nanotubes
vapor deposition
Nanoparticles
catalysts
nanoparticles
Catalysts
mesh
grids
Ion bombardment
Temperature
Electric fields
Plasmas
bombardment
Ions

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Low-temperature growth of multiwalled carbon nanotubes by surface-wave plasma-enhanced chemical vapor deposition using catalyst nanoparticles. / Katagiri, Masayuki; Sakuma, Naoshi; Yamazaki, Yuichi; Suzuki, Mariko; Sato, Shintaro; Nihei, Mizuhisa; Sakai, Tadashi; Awano, Yuji.

In: Japanese Journal of Applied Physics, Vol. 48, No. 9 Part 1, 2009, p. 902051-902053.

Research output: Contribution to journalArticle

Katagiri, Masayuki ; Sakuma, Naoshi ; Yamazaki, Yuichi ; Suzuki, Mariko ; Sato, Shintaro ; Nihei, Mizuhisa ; Sakai, Tadashi ; Awano, Yuji. / Low-temperature growth of multiwalled carbon nanotubes by surface-wave plasma-enhanced chemical vapor deposition using catalyst nanoparticles. In: Japanese Journal of Applied Physics. 2009 ; Vol. 48, No. 9 Part 1. pp. 902051-902053.
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