Low-temperature synthesis of ITO thin films using an ultraviolet laser for conductive coating on organic polymer substrates

Naoko Asakuma, Toshimi Fukui, Motoyuki Toki, Hiroaki Imai

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

The resistivity of sol-gel-derived indium tin oxide (ITO) films effectively decreased with crystallization by exposure to a low fluence UV beam (10-20 mJ/cm2) from an ArF laser. The increase in temperature at the surface of the films was below 10°C under the irradiation condition. Thus, conductive and transparent ITO coatings were successfully obtained on polyethylene terephthalate and polyimide sheets using a sol-gel route assisted with an ultraviolet laser beam.

Original languageEnglish
Pages (from-to)91-95
Number of pages5
JournalJournal of Sol-Gel Science and Technology
Volume27
Issue number1
DOIs
Publication statusPublished - 2003 May 1

Keywords

  • ITO
  • Organic polymer
  • Sol-gel
  • Ultraviolet laser

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Chemistry(all)
  • Biomaterials
  • Condensed Matter Physics
  • Materials Chemistry

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