Low voltage charge-balanced capacitance-voltage conversion circuit for one-side-electrode-type fluid-based inclination sensor

Asrulnizam Bin Abd Manaf, Yoshinori Matsumoto

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A low voltage detection circuit for a capacitance sensor is important for connection to a low voltage digital circuit interface. We studied two different charge-balanced capacitance-voltage (C-V) conversion circuits configurations; the operational amplifier and the inverter amplifier. Both capacitance detection circuits were designed using 0.35 μm CMOS circuitry technology. Both amplifiers used in the detection circuits were not affected by offset voltage. The current consumption for capacitance detection circuit was reduced from 250 μA at Vdd 3.3 V to 38 μA at Vdd 1.3 V by switching from an operational amplifier to an inverter amplifier. These circuits were packaged with one-side-electrode-type fluid-based inclination sensors on ceramic substrates. The size of the sensor is ∅ 4.0 mm × 1.0 mm and pure propylene carbonate was used as electrolyte. Changes in temperature did not affect the output voltage of the sensor between -10 °C and 50 °C. This results show that the inverter amplifier used in the detection circuit was not affected by offset voltage and the output voltage Vm is depends only on capacitor ratio. The capacitance detection circuit using the inverter amplifier shows a high-sensitivity of about 7 mV/deg over the operational amplifier at Vdd 1.3 V. The response time, resolution and minimum moving angle of sensor were 0.7 s, 0.86° and 0.4°, respectively, at Vdd 1.3 V for the inverter amplifier type of capacitance detection circuit.

Original languageEnglish
Pages (from-to)63-69
Number of pages7
JournalSolid-State Electronics
Volume53
Issue number1
DOIs
Publication statusPublished - 2009 Jan

Fingerprint

low voltage
inclination
Capacitance
capacitance
Electrodes
Fluids
electrodes
Networks (circuits)
fluids
sensors
Sensors
Electric potential
electric potential
amplifiers
operational amplifiers
Operational amplifiers
digital electronics
output
Digital circuits
propylene

Keywords

  • Capacitance sensor
  • Digital circuitry
  • Electrical double layer
  • Inclinometer
  • PDMS
  • SU-8

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry

Cite this

Low voltage charge-balanced capacitance-voltage conversion circuit for one-side-electrode-type fluid-based inclination sensor. / Manaf, Asrulnizam Bin Abd; Matsumoto, Yoshinori.

In: Solid-State Electronics, Vol. 53, No. 1, 01.2009, p. 63-69.

Research output: Contribution to journalArticle

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