Machining-induced subsurface damage in single-crystal silicon-formation, characterization, and recovery-

Research output: Contribution to journal › Review article › peer-review

Original language	English
Pages (from-to)	971-974
Number of pages	4
Journal	Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume	84
Issue number	12
DOIs	https://doi.org/10.2493/jjspe.84.971
Publication status	Published - 2018 Jan 1

ASJC Scopus subject areas

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title = "Machining-induced subsurface damage in single-crystal silicon-formation, characterization, and recovery-",

author = "Jiwang Yan",

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