Machining-induced subsurface damage in single-crystal silicon-formation, characterization, and recovery-

Research output: Contribution to journalReview article

Original languageEnglish
Pages (from-to)971-974
Number of pages4
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume84
Issue number12
DOIs
Publication statusPublished - 2018 Jan 1

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Machining
Single crystals
Recovery
Silicon

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

@article{f7195cc3517240f8955680431b713e6b,
title = "Machining-induced subsurface damage in single-crystal silicon-formation, characterization, and recovery-",
author = "Jiwang Yan",
year = "2018",
month = "1",
day = "1",
doi = "10.2493/jjspe.84.971",
language = "English",
volume = "84",
pages = "971--974",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "12",

}

TY - JOUR

T1 - Machining-induced subsurface damage in single-crystal silicon-formation, characterization, and recovery-

AU - Yan, Jiwang

PY - 2018/1/1

Y1 - 2018/1/1

UR - http://www.scopus.com/inward/record.url?scp=85057720924&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85057720924&partnerID=8YFLogxK

U2 - 10.2493/jjspe.84.971

DO - 10.2493/jjspe.84.971

M3 - Review article

AN - SCOPUS:85057720924

VL - 84

SP - 971

EP - 974

JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

SN - 0912-0289

IS - 12

ER -