Machining-induced subsurface damage in single-crystal silicon-formation, characterization, and recovery-

Research output: Contribution to journalReview article

Original languageEnglish
Pages (from-to)971-974
Number of pages4
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume84
Issue number12
DOIs
Publication statusPublished - 2018 Jan 1

ASJC Scopus subject areas

  • Mechanical Engineering

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