Manufacture of glass nanoparticles by electrospraying

Kazuhiro Uchida, Atsushi Hotta, Koichi Hishida, Norihisa Miki

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Glass substrates functionalized by biochemical substances and/or metal thin films have been used in a number of micro-total analysis systems (μTAS) and microelectromechanical systems (MEMS) devices. We propose a dry patterning process for glass nanoparticles (NPs) using an electrospray of the sol of tetraethyl orthosilicate (TEOS) containing hydrochloric acid as a catalyst. We experimentally found that the size of the glass NPs was controlled by the viscosity and feed rate of the TEOS sol, and the applied voltage. In order to verify the usefulness of these glass NPs, we deposited silver NPs on the glass NPs using a modified silver mirror reaction. Silver NPs are reported to enhance the Raman scattering, which is required for ultrasensitive biochemical sensing. Silver NPs on the glass NPs were experimentally found to exhibit greater surface-enhanced Raman scattering than those on a flat glass substrate. Silver NPs can be used in chemical sensors, such as surface-enhanced Raman scattering (SERS) and fluorescence spectroscopy, due to the enhanced electromagnetic field on the surface. Silver NPs are deposited on the glass NPs by the silver mirror reaction with dispersants, for application as ultrasensitive sensors. When silver NPs are formed sterically congested, the enhanced Raman spectrum from the silver NPs on the electrosprayed glass NPs shows an intensity three times that from silver NPs on a flat glass plate substrate. The glass NPs formed by electrospraying are thus proving to yield high performance substrates for chemical sensors.

Original languageEnglish
Article number025023
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number2
DOIs
Publication statusPublished - 2013 Feb

Fingerprint

Nanoparticles
Glass
Silver
Raman scattering
Polymethyl Methacrylate
Substrates
Sols
Chemical sensors
Mirrors
Hydrochloric Acid
Fluorescence spectroscopy
Hydrochloric acid
Electromagnetic fields
MEMS
Metals
Viscosity
Thin films
Catalysts
Sensors

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials

Cite this

Manufacture of glass nanoparticles by electrospraying. / Uchida, Kazuhiro; Hotta, Atsushi; Hishida, Koichi; Miki, Norihisa.

In: Journal of Micromechanics and Microengineering, Vol. 23, No. 2, 025023, 02.2013.

Research output: Contribution to journalArticle

@article{c9b28da4732945ea8776e51a54072c23,
title = "Manufacture of glass nanoparticles by electrospraying",
abstract = "Glass substrates functionalized by biochemical substances and/or metal thin films have been used in a number of micro-total analysis systems (μTAS) and microelectromechanical systems (MEMS) devices. We propose a dry patterning process for glass nanoparticles (NPs) using an electrospray of the sol of tetraethyl orthosilicate (TEOS) containing hydrochloric acid as a catalyst. We experimentally found that the size of the glass NPs was controlled by the viscosity and feed rate of the TEOS sol, and the applied voltage. In order to verify the usefulness of these glass NPs, we deposited silver NPs on the glass NPs using a modified silver mirror reaction. Silver NPs are reported to enhance the Raman scattering, which is required for ultrasensitive biochemical sensing. Silver NPs on the glass NPs were experimentally found to exhibit greater surface-enhanced Raman scattering than those on a flat glass substrate. Silver NPs can be used in chemical sensors, such as surface-enhanced Raman scattering (SERS) and fluorescence spectroscopy, due to the enhanced electromagnetic field on the surface. Silver NPs are deposited on the glass NPs by the silver mirror reaction with dispersants, for application as ultrasensitive sensors. When silver NPs are formed sterically congested, the enhanced Raman spectrum from the silver NPs on the electrosprayed glass NPs shows an intensity three times that from silver NPs on a flat glass plate substrate. The glass NPs formed by electrospraying are thus proving to yield high performance substrates for chemical sensors.",
author = "Kazuhiro Uchida and Atsushi Hotta and Koichi Hishida and Norihisa Miki",
year = "2013",
month = "2",
doi = "10.1088/0960-1317/23/2/025023",
language = "English",
volume = "23",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "2",

}

TY - JOUR

T1 - Manufacture of glass nanoparticles by electrospraying

AU - Uchida, Kazuhiro

AU - Hotta, Atsushi

AU - Hishida, Koichi

AU - Miki, Norihisa

PY - 2013/2

Y1 - 2013/2

N2 - Glass substrates functionalized by biochemical substances and/or metal thin films have been used in a number of micro-total analysis systems (μTAS) and microelectromechanical systems (MEMS) devices. We propose a dry patterning process for glass nanoparticles (NPs) using an electrospray of the sol of tetraethyl orthosilicate (TEOS) containing hydrochloric acid as a catalyst. We experimentally found that the size of the glass NPs was controlled by the viscosity and feed rate of the TEOS sol, and the applied voltage. In order to verify the usefulness of these glass NPs, we deposited silver NPs on the glass NPs using a modified silver mirror reaction. Silver NPs are reported to enhance the Raman scattering, which is required for ultrasensitive biochemical sensing. Silver NPs on the glass NPs were experimentally found to exhibit greater surface-enhanced Raman scattering than those on a flat glass substrate. Silver NPs can be used in chemical sensors, such as surface-enhanced Raman scattering (SERS) and fluorescence spectroscopy, due to the enhanced electromagnetic field on the surface. Silver NPs are deposited on the glass NPs by the silver mirror reaction with dispersants, for application as ultrasensitive sensors. When silver NPs are formed sterically congested, the enhanced Raman spectrum from the silver NPs on the electrosprayed glass NPs shows an intensity three times that from silver NPs on a flat glass plate substrate. The glass NPs formed by electrospraying are thus proving to yield high performance substrates for chemical sensors.

AB - Glass substrates functionalized by biochemical substances and/or metal thin films have been used in a number of micro-total analysis systems (μTAS) and microelectromechanical systems (MEMS) devices. We propose a dry patterning process for glass nanoparticles (NPs) using an electrospray of the sol of tetraethyl orthosilicate (TEOS) containing hydrochloric acid as a catalyst. We experimentally found that the size of the glass NPs was controlled by the viscosity and feed rate of the TEOS sol, and the applied voltage. In order to verify the usefulness of these glass NPs, we deposited silver NPs on the glass NPs using a modified silver mirror reaction. Silver NPs are reported to enhance the Raman scattering, which is required for ultrasensitive biochemical sensing. Silver NPs on the glass NPs were experimentally found to exhibit greater surface-enhanced Raman scattering than those on a flat glass substrate. Silver NPs can be used in chemical sensors, such as surface-enhanced Raman scattering (SERS) and fluorescence spectroscopy, due to the enhanced electromagnetic field on the surface. Silver NPs are deposited on the glass NPs by the silver mirror reaction with dispersants, for application as ultrasensitive sensors. When silver NPs are formed sterically congested, the enhanced Raman spectrum from the silver NPs on the electrosprayed glass NPs shows an intensity three times that from silver NPs on a flat glass plate substrate. The glass NPs formed by electrospraying are thus proving to yield high performance substrates for chemical sensors.

UR - http://www.scopus.com/inward/record.url?scp=84877931435&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84877931435&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/23/2/025023

DO - 10.1088/0960-1317/23/2/025023

M3 - Article

VL - 23

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 2

M1 - 025023

ER -