TY - JOUR
T1 - Measurement and compensation of tool contour error using white light interferometry for ultra-precision diamond turning of freeform surfaces
AU - Nagayama, Kodai
AU - Yan, Jiwang
N1 - Publisher Copyright:
© 2020, Fuji Technology Press. All rights reserved.
PY - 2020
Y1 - 2020
N2 - In ultra-precision diamond turning of freeform optics, it is necessary to obtain submicron-level form accuracy with high efficiency. In this study, we proposed a new method for the quick measurement and compensation of tool contour errors to improve the form accuracy of the workpiece. In this method, the nanometer-scale contour error of a diamond tool is quickly and precisely measured using a white light interferometer and then compensated for, before machining. Results showed that the contour of a diamond tool was measured with an error less than 0.05 μm peak-to-valley (P-V) and the feasibility of error compensation was verified through cutting experiments to create a paraboloid mirror and a microlens array. The form error decreased to 0.2 μm P-V regardless of the contour error of the diamond tools when cutting the paraboloid mirror, and that of the microlens array was reduced to 0.15 μm P-V during a single machining step.
AB - In ultra-precision diamond turning of freeform optics, it is necessary to obtain submicron-level form accuracy with high efficiency. In this study, we proposed a new method for the quick measurement and compensation of tool contour errors to improve the form accuracy of the workpiece. In this method, the nanometer-scale contour error of a diamond tool is quickly and precisely measured using a white light interferometer and then compensated for, before machining. Results showed that the contour of a diamond tool was measured with an error less than 0.05 μm peak-to-valley (P-V) and the feasibility of error compensation was verified through cutting experiments to create a paraboloid mirror and a microlens array. The form error decreased to 0.2 μm P-V regardless of the contour error of the diamond tools when cutting the paraboloid mirror, and that of the microlens array was reduced to 0.15 μm P-V during a single machining step.
KW - Diamond tool
KW - Form error compensation
KW - Freeform surface
KW - Ultra-precision cutting
KW - White light interferometry
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U2 - 10.20965/ijat.2020.p0654
DO - 10.20965/ijat.2020.p0654
M3 - Article
AN - SCOPUS:85088224989
VL - 14
SP - 654
EP - 664
JO - International Journal of Automation Technology
JF - International Journal of Automation Technology
SN - 1881-7629
IS - 4
ER -