Measurement and compensation of tool contour error using white light interferometry for ultra-precision diamond turning of freeform surfaces

Kodai Nagayama, Jiwang Yan

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

In ultra-precision diamond turning of freeform optics, it is necessary to obtain submicron-level form accuracy with high efficiency. In this study, we proposed a new method for the quick measurement and compensation of tool contour errors to improve the form accuracy of the workpiece. In this method, the nanometer-scale contour error of a diamond tool is quickly and precisely measured using a white light interferometer and then compensated for, before machining. Results showed that the contour of a diamond tool was measured with an error less than 0.05 μm peak-to-valley (P-V) and the feasibility of error compensation was verified through cutting experiments to create a paraboloid mirror and a microlens array. The form error decreased to 0.2 μm P-V regardless of the contour error of the diamond tools when cutting the paraboloid mirror, and that of the microlens array was reduced to 0.15 μm P-V during a single machining step.

Original languageEnglish
Pages (from-to)654-664
Number of pages11
JournalInternational Journal of Automation Technology
Volume14
Issue number4
DOIs
Publication statusPublished - 2020

Keywords

  • Diamond tool
  • Form error compensation
  • Freeform surface
  • Ultra-precision cutting
  • White light interferometry

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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