Measurement of an airflow velocity change using a cantilever with Pb(Zr, Ti)O3

Yutaka Tomimatsu, Hidetoshi Takahashi, Kenta Kuwana, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We proposed a thin piezoelectric cantilever to measure an airflow velocity change. An airflow sensor using a PZT cantilever and a flow channel was fabricated. We measured the relationship between the airflow velocity change and the piezoelectric voltage of the cantilever. The dimensions of the sensor and the cantilever are 25 mm × 20 mm × 20 mm and 1500 μm × 1000 μm × 2 μm respectively. We evaluated the effect of the diameter of the flow channel on the sensor response. It was demonstrated that the fabricated sensor generated an output voltage of several millivolts when the airflow velocity changed at a rate of approximately 1 m/s. It was observed that the output voltage increased as the diameter of the flow channel became small.

Original languageEnglish
Title of host publication2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013
Publication statusPublished - 2013 Sep 2
Event2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013 - Barcelona, Spain
Duration: 2013 Apr 162013 Apr 18

Publication series

Name2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013

Conference

Conference2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013
CountrySpain
CityBarcelona
Period13/4/1613/4/18

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ASJC Scopus subject areas

  • Hardware and Architecture

Cite this

Tomimatsu, Y., Takahashi, H., Kuwana, K., Kobayashi, T., Matsumoto, K., Shimoyama, I., Itoh, T., & Maeda, R. (2013). Measurement of an airflow velocity change using a cantilever with Pb(Zr, Ti)O3. In 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013 [6559430] (2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013).