Measurement of high-NA axisymmetric aspherical surface with continuous interference method

Y. Nagaike, T. Kuriyagawa, W. Gao, J. Yan, N. Yoshihara

Research output: Contribution to journalArticle

Abstract

The measurement principle where in a high-NA (Numerical Aperture) surface, for which the degree of the angle of surface inclination exceeds π/3 radians, could be evaluated with high precision and high speed is proposed. This is based on the stitching method, where aspherical surface measurement becomes possible by dividing the surface of the sample into a range so that measurements can be made with an interferometer and finally combined. We examine the method of applying an interferometer to the condition in which the sample is rotated on an air spindle at a constant speed. It is not necessary in this method to make the sample static. Therefore, the vibration of the servo motor and any location errors can be eliminated. Moreover, the measurement time does not depend on the number of divided areas which are necessary for the stitching method, allowing for high-speed measurement. The principle behind this technique is expanded first, and an experiment system based on it was constructed. The principle proposed was evaluated, and its effectiveness was confirmed.

Original languageEnglish
Pages (from-to)102-107
Number of pages6
JournalKey Engineering Materials
Volume389-390
Publication statusPublished - 2009 Jan 1
Externally publishedYes

Keywords

  • Aspherical surface
  • Continuous interference method
  • High-NA
  • Interferometer
  • Phase shift method
  • Precision measurement

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Nagaike, Y., Kuriyagawa, T., Gao, W., Yan, J., & Yoshihara, N. (2009). Measurement of high-NA axisymmetric aspherical surface with continuous interference method. Key Engineering Materials, 389-390, 102-107.