Measurement of the Thermal Diffusivity of Thin Film on Substrate by the Photoacoustic Method: (1st Report, Examination of the Method and Measurement of Metal Thin Foils)

Masanori Akabori, Shunsuke Miyagi, Yuji Nagasaka, Akira Nagashima

Research output: Contribution to journalArticle

Abstract

This paper reports the measurement of the thermal diffusivity of thin films on substrate by the photoacoustic method. In order to examine the method, we built a new apparatus and proposed (1) a system calibration procedure using thermally thick materials and (2) a data analysis procedure based on the Rosencwaig and Gersho theory (RG theory). As a result of using a transparent photoacoustic cell, the systematic error factors which were caused by stray light have been reduced. With this apparatus, measurements have been performed on platinum, titanium and stainless steel (SUS304) thin foils (thickness: 50–100 µm) with three different substrate materials (water, glycerol, and ethyl alcohol). The reproducibility was within ±7% regardless of the film thickness and substrate material.

Original languageEnglish
Pages (from-to)3184-3190
Number of pages7
JournalTransactions of the Japan Society of Mechanical Engineers Series B
Volume57
Issue number541
DOIs
Publication statusPublished - 1991 Jan 1
Externally publishedYes

Keywords

  • Photoacoustic Method
  • RG theory
  • Thermal Diffusivity
  • Thermophysical Properties
  • Thin Film on Substrate

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanical Engineering

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