Measurement of the thermal diffusivity of thin films on substrate by the photoacoustic method

M. Akabori, Yuji Nagasaka, A. Nagashima

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Measurements of the thermal diffusivity of thin films on substrate have been performed by the photoacoustic method. In order to examine the method we have built a new apparatus and proposed (1) a system calibration procedure using optically and thermally thick reference samples and (2) a data analysis procedure based on the RG (Rosencwaig and Gersho) theory. As a result of using a transparent photoacoustic cell, the systematic errors which are caused by stray light have been reduced. With this apparatus, measurements have been performed on platinum, titanium, and stainless steel (SUS304) thin foils (thickness form 50 to 100 μm) with three different liquid backing materials (water, glycerol, and ethyl alcohol). The reproducibility was within ±7% regardless of film thickness and substrate materials.

Original languageEnglish
Pages (from-to)499-514
Number of pages16
JournalInternational Journal of Thermophysics
Volume13
Issue number3
DOIs
Publication statusPublished - 1992 May

Fingerprint

Photoacoustic effect
Thermal diffusivity
thermal diffusivity
alcohols
steels
Stray light
Thin films
Systematic errors
backups
Stainless Steel
Substrates
thin films
glycerols
Titanium
Platinum
Glycerol
systematic errors
Metal foil
Film thickness
stainless steels

Keywords

  • photoacoustic method
  • RG (Rosencwaig and Gersho) theory
  • thermal diffusivity
  • thin film on substrate

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Mechanics of Materials
  • Computational Mechanics
  • Physical and Theoretical Chemistry
  • Fluid Flow and Transfer Processes

Cite this

Measurement of the thermal diffusivity of thin films on substrate by the photoacoustic method. / Akabori, M.; Nagasaka, Yuji; Nagashima, A.

In: International Journal of Thermophysics, Vol. 13, No. 3, 05.1992, p. 499-514.

Research output: Contribution to journalArticle

@article{429058df8ad2418e8ccdb39bb9f43902,
title = "Measurement of the thermal diffusivity of thin films on substrate by the photoacoustic method",
abstract = "Measurements of the thermal diffusivity of thin films on substrate have been performed by the photoacoustic method. In order to examine the method we have built a new apparatus and proposed (1) a system calibration procedure using optically and thermally thick reference samples and (2) a data analysis procedure based on the RG (Rosencwaig and Gersho) theory. As a result of using a transparent photoacoustic cell, the systematic errors which are caused by stray light have been reduced. With this apparatus, measurements have been performed on platinum, titanium, and stainless steel (SUS304) thin foils (thickness form 50 to 100 μm) with three different liquid backing materials (water, glycerol, and ethyl alcohol). The reproducibility was within ±7{\%} regardless of film thickness and substrate materials.",
keywords = "photoacoustic method, RG (Rosencwaig and Gersho) theory, thermal diffusivity, thin film on substrate",
author = "M. Akabori and Yuji Nagasaka and A. Nagashima",
year = "1992",
month = "5",
doi = "10.1007/BF00503886",
language = "English",
volume = "13",
pages = "499--514",
journal = "International Journal of Thermophysics",
issn = "0195-928X",
publisher = "Springer New York",
number = "3",

}

TY - JOUR

T1 - Measurement of the thermal diffusivity of thin films on substrate by the photoacoustic method

AU - Akabori, M.

AU - Nagasaka, Yuji

AU - Nagashima, A.

PY - 1992/5

Y1 - 1992/5

N2 - Measurements of the thermal diffusivity of thin films on substrate have been performed by the photoacoustic method. In order to examine the method we have built a new apparatus and proposed (1) a system calibration procedure using optically and thermally thick reference samples and (2) a data analysis procedure based on the RG (Rosencwaig and Gersho) theory. As a result of using a transparent photoacoustic cell, the systematic errors which are caused by stray light have been reduced. With this apparatus, measurements have been performed on platinum, titanium, and stainless steel (SUS304) thin foils (thickness form 50 to 100 μm) with three different liquid backing materials (water, glycerol, and ethyl alcohol). The reproducibility was within ±7% regardless of film thickness and substrate materials.

AB - Measurements of the thermal diffusivity of thin films on substrate have been performed by the photoacoustic method. In order to examine the method we have built a new apparatus and proposed (1) a system calibration procedure using optically and thermally thick reference samples and (2) a data analysis procedure based on the RG (Rosencwaig and Gersho) theory. As a result of using a transparent photoacoustic cell, the systematic errors which are caused by stray light have been reduced. With this apparatus, measurements have been performed on platinum, titanium, and stainless steel (SUS304) thin foils (thickness form 50 to 100 μm) with three different liquid backing materials (water, glycerol, and ethyl alcohol). The reproducibility was within ±7% regardless of film thickness and substrate materials.

KW - photoacoustic method

KW - RG (Rosencwaig and Gersho) theory

KW - thermal diffusivity

KW - thin film on substrate

UR - http://www.scopus.com/inward/record.url?scp=0001732259&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0001732259&partnerID=8YFLogxK

U2 - 10.1007/BF00503886

DO - 10.1007/BF00503886

M3 - Article

AN - SCOPUS:0001732259

VL - 13

SP - 499

EP - 514

JO - International Journal of Thermophysics

JF - International Journal of Thermophysics

SN - 0195-928X

IS - 3

ER -