Abstract
Measurements of the thermal diffusivity of thin films on substrate have been performed by the photoacoustic method. In order to examine the method we have built a new apparatus and proposed (1) a system calibration procedure using optically and thermally thick reference samples and (2) a data analysis procedure based on the RG (Rosencwaig and Gersho) theory. As a result of using a transparent photoacoustic cell, the systematic errors which are caused by stray light have been reduced. With this apparatus, measurements have been performed on platinum, titanium, and stainless steel (SUS304) thin foils (thickness form 50 to 100 μm) with three different liquid backing materials (water, glycerol, and ethyl alcohol). The reproducibility was within ±7% regardless of film thickness and substrate materials.
| Original language | English |
|---|---|
| Pages (from-to) | 499-514 |
| Number of pages | 16 |
| Journal | International Journal of Thermophysics |
| Volume | 13 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 1992 May |
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Keywords
- photoacoustic method
- RG (Rosencwaig and Gersho) theory
- thermal diffusivity
- thin film on substrate
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Mechanics of Materials
- Computational Mechanics
- Physical and Theoretical Chemistry
- Fluid Flow and Transfer Processes
Cite this
Measurement of the thermal diffusivity of thin films on substrate by the photoacoustic method. / Akabori, M.; Nagasaka, Yuji; Nagashima, A.
In: International Journal of Thermophysics, Vol. 13, No. 3, 05.1992, p. 499-514.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Measurement of the thermal diffusivity of thin films on substrate by the photoacoustic method
AU - Akabori, M.
AU - Nagasaka, Yuji
AU - Nagashima, A.
PY - 1992/5
Y1 - 1992/5
N2 - Measurements of the thermal diffusivity of thin films on substrate have been performed by the photoacoustic method. In order to examine the method we have built a new apparatus and proposed (1) a system calibration procedure using optically and thermally thick reference samples and (2) a data analysis procedure based on the RG (Rosencwaig and Gersho) theory. As a result of using a transparent photoacoustic cell, the systematic errors which are caused by stray light have been reduced. With this apparatus, measurements have been performed on platinum, titanium, and stainless steel (SUS304) thin foils (thickness form 50 to 100 μm) with three different liquid backing materials (water, glycerol, and ethyl alcohol). The reproducibility was within ±7% regardless of film thickness and substrate materials.
AB - Measurements of the thermal diffusivity of thin films on substrate have been performed by the photoacoustic method. In order to examine the method we have built a new apparatus and proposed (1) a system calibration procedure using optically and thermally thick reference samples and (2) a data analysis procedure based on the RG (Rosencwaig and Gersho) theory. As a result of using a transparent photoacoustic cell, the systematic errors which are caused by stray light have been reduced. With this apparatus, measurements have been performed on platinum, titanium, and stainless steel (SUS304) thin foils (thickness form 50 to 100 μm) with three different liquid backing materials (water, glycerol, and ethyl alcohol). The reproducibility was within ±7% regardless of film thickness and substrate materials.
KW - photoacoustic method
KW - RG (Rosencwaig and Gersho) theory
KW - thermal diffusivity
KW - thin film on substrate
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U2 - 10.1007/BF00503886
DO - 10.1007/BF00503886
M3 - Article
AN - SCOPUS:0001732259
VL - 13
SP - 499
EP - 514
JO - International Journal of Thermophysics
JF - International Journal of Thermophysics
SN - 0195-928X
IS - 3
ER -