Measurement of vacuum pressure with cantilever-based differential pressure sensor utilizing vapor pressure and narrow gap of cantilever

N. Namioka, Y. Takei, N. Minh-Dung, T. Usami, N. Thanh-Vinh, Hidetoshi Takahashi, T. Takahata, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports a measurement method of vacuum pressure from 10-1 to 103 Pa with a piezoresistive cantilever-based differential pressure sensor (DPS). The gap around the cantilever of the DPS was narrow (2 μm) so that the air flow through it was suppressed. The through-hole beneath the sensor is connected to a chamber which is filled with saturated vapor. This method allows the pressure of the chamber to be stable at the vapor pressure of the liquid even when the exterior was vacuumed. The exterior vacuum pressure was calculated from the cantilever output since the vapor pressure of the chamber is known. We showed that the lower limit of measurable range was expanded into 0.1 Pa owing to noise reduction. The proposed method is promising to realize wide-range vacuum pressure measurement.

Original languageEnglish
Title of host publicationMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages836-838
Number of pages3
ISBN (Electronic)9781509019731
DOIs
Publication statusPublished - 2016 Feb 26
Externally publishedYes
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 2016 Jan 242016 Jan 28

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2016-February
ISSN (Print)1084-6999

Other

Other29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
CountryChina
CityShanghai
Period16/1/2416/1/28

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Namioka, N., Takei, Y., Minh-Dung, N., Usami, T., Thanh-Vinh, N., Takahashi, H., Takahata, T., Matsumoto, K., & Shimoyama, I. (2016). Measurement of vacuum pressure with cantilever-based differential pressure sensor utilizing vapor pressure and narrow gap of cantilever. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 836-838). [7421759] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421759