Measurement of vacuum pressure with cantilever-based differential pressure sensor utilizing vapor pressure and narrow gap of cantilever

N. Namioka, Y. Takei, N. Minh-Dung, T. Usami, N. Thanh-Vinh, Hidetoshi Takahashi, T. Takahata, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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